An open, arrayed, integrated electrochemical gas sensor and its manufacturing method

A gas sensor and manufacturing method technology, applied in the direction of material electrochemical variables, can solve the problems of poor selectivity, low sensitivity of electrochemical gas sensors, difficulty in forming arrays and integration, etc., to achieve improved repeatability and easy integrated design Make, increase the effect of sensitivity

Inactive Publication Date: 2019-08-30
NO 49 INST CHINESE ELECTRONICS SCI & TECH GRP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problems of low sensitivity, poor selectivity, difficulty in arraying and integration of electrochemical gas sensors, thereby providing an open, arrayed, integrated electrochemical gas sensor and its manufacturing method

Method used

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  • An open, arrayed, integrated electrochemical gas sensor and its manufacturing method
  • An open, arrayed, integrated electrochemical gas sensor and its manufacturing method

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specific Embodiment approach 1

[0044] Specific implementation mode one: combine figure 1 and figure 2 Describe this embodiment in detail. An open, arrayed, and integrated electrochemical gas sensor described in this embodiment includes a plurality of sensing units arranged in an array and integrated into one body. The sensing unit includes an upper electrode layer 1, an electrolytic cell layer 2, a lower electrode layer 3 and an extraction layer 5;

[0045] The upper electrode layer 1, the electrolytic cell layer 2, the lower electrode layer 3 and the lead-out layer 5 are sequentially laminated;

[0046]The substrate of the upper electrode layer 1 is provided with a first electrolytic cell through hole 1-1, a first lead 1-4, a first via hole 1-2 and a catalytic electrode 1-3; the catalytic electrode 1-3 passes through the first lead 1 -4 communicates with the first through hole 1-2, and the catalytic electrode 1-3 semi-closed covers the through hole 1-1 of the first electrolytic cell;

[0047] The subst...

specific Embodiment approach 2

[0059] Specific embodiment 2: This embodiment is a further description of an open, arrayed, and integrated electrochemical gas sensor described in Specific Embodiment 1. In this embodiment, the slurry of catalytic electrodes 1-3 Includes porogen.

[0060] Catalytic electrodes 1-3 are printed and molded using catalytic electrode paste, and the porous catalytic electrode is realized by adding a pore-forming agent in the paste to increase the sensitivity to sensing gas. The pore-forming agent is carbon powder, organic matter, etc.; the catalytic electrode paste is noble metal and compound, etc.

specific Embodiment approach 3

[0061] Specific embodiment three: this embodiment is a kind of open, arrayed, integrated electrochemical gas sensor described in specific embodiment two, and in this embodiment, the substrate of the lower electrode layer 3 is also provided with There are a reference electrode 3-2, a third lead wire 3-7 and a fifth via hole 3-3; the reference electrode 3-2 is a semi-closed ring, the counter electrode 3-1 is located in the semi-closed ring, and the reference electrode 3-2 communicates with the fifth via hole 3-3 through the third lead 3-7;

[0062] A third lead-out terminal 5-3 is also provided on the substrate of the lead-out layer 5;

[0063] The third lead-out end 5-3 communicates with the fifth via hole 3-3.

[0064] The counter electrode 3-1 and the reference electrode 3-2 are coaxially arranged, the counter electrode 3-1 is located inside the reference electrode 3-2, the reference electrode 3-2 presents a semi-closed ring structure, and the gap is used for the counter ele...

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Abstract

The invention provides an open-type, array-form and integrated electrochemical gas sensor and a manufacturing method thereof and relates to an electrochemical gas sensor. According to the electrochemical gas sensor and the manufacturing method, the problems that an electrochemical gas sensor is low in sensitivity and poor in selectivity, and the array form and the integration are difficult to realize are solved. The electrochemical gas sensor provided by the invention comprises an upper electrode layer, an electrolytic tank layer, a lower electrode layer and a lead-out layer which are sequentially subjected to counterpoint lamination, wherein a catalytic electrode of the upper electrode layer covers a first electrolytic tank through hole in a semi-closed manner, and a second electrolytic tank through hole is formed in a substrate of the electrolytic tank layer; the first electrolytic tank through hole is communicated with the second electrolytic tank through hole to form an electrolytic tank cavity, and a counter electrode is arranged on a substrate of the lower electrode layer; and the counter electrode is located right below the electrolytic tank cavity, and a plurality of lead-out ends are arranged on a substrate of the lead-out layer. The electrochemical gas sensor provided by the invention is suitable for simultaneously detecting the concentrations of multiple target gases.

Description

technical field [0001] The invention relates to an electrochemical gas sensor, in particular to an open, arrayed and integrated electrochemical gas sensor based on co-firing technology. Background technique [0002] Existing electrochemical gas sensors include two or three electrodes in contact with the electrolyte, which are sensing electrodes, auxiliary electrodes, and reference electrodes. Usually, the sensing electrodes are dispersed at the porous gas-permeable membrane, and the target gas flows through the gas-permeable membrane at the electrodes. The upper reaction, the equilibrium reaction occurs at the auxiliary electrode, and the electrolyte supports the related reactions. A reaction occurs through the sensing electrode to output a signal related to the concentration of the target gas in the environment. These principles are well known and documented. [0003] Electrochemical gas sensors have been widely used in the detection of gas types and concentrations in ind...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/27
Inventor 杨永超秦浩王洋洋刘洋周明军
Owner NO 49 INST CHINESE ELECTRONICS SCI & TECH GRP
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