Electronic heterosynaptic device having vertical structure and preparation method thereof
An electronic synapse, vertical structure technology, applied in electrical components and other directions, can solve problems such as miniaturization limitations, and achieve the effects of high integration and miniaturization, low power consumption, and low fabrication process
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[0032] The present invention will be further elaborated below through specific embodiments in conjunction with the accompanying drawings.
[0033] Such as Figure 4 As shown, the vertical heterogeneous electronic synaptic device of this embodiment includes: a substrate, a bottom electrode 3, a resistive layer 4, a top electrode 5, an insulating modulation layer 6, and a modulation electrode 7; The pattern of the bottom electrode 3, the bottom electrode 3, the resistive layer 4 and the top electrode 5 are sequentially formed on the substrate, and the bottom electrode 3, the resistive layer 4 and the top electrode 5 form a MIM nano stack structure; An insulating modulation layer 6 is formed on the stack structure, and the insulating modulation layer 6 covers the substrate, the top surface and two side walls of the MIM nano-stack structure; the modulation electrode 7 and the modulation electrode connected to it are formed on the insulating modulation layer 6. Terminal ME, the mo...
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