A Disturbance Position Determination Method for Weakly Coupled Resonant Sensors
A technology of resonant sensors and determination methods, which is applied in the field of micro-electromechanical systems, and can solve problems such as limiting the practical application prospects of multi-degree-of-freedom sensors
Active Publication Date: 2019-09-24
NORTHWESTERN POLYTECHNICAL UNIV
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Problems solved by technology
[0004] However, there is an important problem in the practical application of the multi-degree-of-freedom coupled resonant mass sensor: due to the mutual coupling of multiple resonators, each resonator will cause a change in the amplitude ratio when it is disturbed, so it cannot pass the amplitude The change in ratio accurately determines which resonator the mass disturbance is imposed on, which severely limits the practical application prospects of such multi-degree-of-freedom sensors.
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[0029] Figure 4 The structural design and detection scheme of a two-degree-of-freedom weakly coupled resonant mass sensor in this embodiment are shown. Resonator I401 and resonator II406 are coupled together by a coupling structure 403, i.e. a mechanical coupling beam, to form a weakly coupled resonator system. 402 is the piezoelectric driving electrode of the resonator I, 405 is the piezoelectric driving electrode of the resonator II, and 406 is the resonator II. The weakly coupled resonator system adopts the method of piezoelectric driving and piezoelectric detection, and the frequency-sweeping AC signal from the network analyzer 407 is connected with the electric drive electrode 405 of the resonator II, that is, the piezoelectric layer of the resonator II, thereby driving the weak Coupled resonators vibrate. The amplitude-frequency response curves of resonator I401 and resonator II406 under the condition of no mass interference can be obtained by frequency scanning metho...
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The invention relates to a disturbance positioning method based on modal localization for a multi-degree-of-freedom weak coupling sensor, which belongs to the field of micro-electromechanical systems (MEMS). According to the method, the anti-resonance point of a multi-degree-of-freedom weak coupling resonator system is used to design a mass sensor; the coupling resonator system is composed of two coupling cantilever resonators; a dynamic signal analyzer analyzes the amplitude-frequency response curve of two cantilever resonators to observe the anti-resonance point change; when the anti-resonance frequency of the resonator 2 changes, the fact that the mass of the resonator 1 is disturbed is determined; when the anti-resonance frequency of the resonator 1 changes, the fact that the mass of the resonator 2 is disturbed is determined; the anti-resonance frequency and the mass disturbance are in a linear relationship; and the magnitude of the mass disturbance can be determined through the variation of the anti-resonance frequency.
Description
[0001] Field: [0002] The invention discloses a method for determining a disturbance position of a weakly coupled resonant sensor, relates to a method for determining a disturbance position of a multi-degree-of-freedom weakly coupled sensor based on mode localization, and belongs to the field of microelectromechanical systems (MEMS). Background technique: [0003] MEMS resonant sensors are playing an increasingly important role in more and more fields due to their advantages of high precision, small size, light weight, low power consumption, low cost, easy integration, mass production, and direct digital output. . In recent years, weakly coupled resonant sensors based on mode localization have gradually become a research hotspot in the field of resonant sensors due to their high sensitivity and high robustness. In 2015, Professor Chang Honglong of Northwestern Polytechnical University published an article titled "An acceleration sensing method based on the mode localization ...
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IPC IPC(8): G01G3/16G01G23/01
Inventor 常洪龙张和民康昊杨晶钟纪明
Owner NORTHWESTERN POLYTECHNICAL UNIV