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Shading structure and laser equipment

A technology of shading structure and laser equipment, applied in laser welding equipment, welding equipment, metal processing equipment and other directions, can solve the problems of only single-area scanning and difficult to meet production needs, saving water, electricity and other resources and saving production time , the effect of prolonging the service life

Pending Publication Date: 2017-12-19
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in some cases, there may be two or more separate areas that need to be scanned on the same glass substrate. The current laser annealing settings can only scan one area and one area separately, which is difficult to meet production needs.
[0004] In addition, the same problem of only single-area scanning also exists in the laser lift-off (LLO for short)

Method used

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  • Shading structure and laser equipment
  • Shading structure and laser equipment
  • Shading structure and laser equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] This embodiment provides a light-shielding structure, which can partition the strip-shaped beams, so that the strip-shaped beams can simultaneously scan two or more target areas of the workpiece to be scanned, thereby saving production time, improving production efficiency, and saving water. Electrical and other resources to extend the service life of strip beam generators, such as laser equipment (laser lifetime).

[0033] The light-shielding structure is used to shield the strip beams in partitions. The light-shielding structure includes a first light-shielding plate group and a second light-shielding plate group. The first light-shielding plate group and the second light-shielding plate group each include at least one light-shielding plate. Each light-shielding plate Can be relatively moved, so that the light-shielding structure forms at least two light-transmitting regions.

[0034] Such as figure 1 As shown, the first shading plate group and the second shading pla...

Embodiment 2

[0051] This embodiment provides a light-shielding structure, which can realize the simultaneous scanning of two target areas of the workpiece to be scanned by the strip beam, thereby improving the production efficiency.

[0052] Such as Figure 4 As shown, in the shading structure, the first shading plate group includes the first shading plate 1 , the first shading plate 1 is rectangular, and the moving direction of the first shading plate 1 is set to be perpendicular to the first direction.

[0053] It is easy to understand that the shading structure also includes a first guide rail group and a second guide rail group, the first guide rail group includes the first guide rail 5, the second guide rail group includes the second guide rail 6, the extension direction of the first guide rail 5 and the second guide rail The extending directions of 6 are perpendicular to each other, the first guide rail 5 is arranged on the second guide rail 6 , and the first light shielding plate 1 ...

Embodiment 3

[0060] This embodiment provides a laser device, which includes a workpiece carrier and a laser set opposite to the workpiece carrier. The laser forms a strip beam, and a light-shielding structure is arranged between the workpiece carrier and the laser. The light-shielding structure in Example 1 or Example 2.

[0061] The light-shielding structure includes a plurality of movable light-shielding plates that can be relatively close to or far away from the beam center of the laser, and the light-shielding plates divide the beam irradiated by the workpiece carrier plate into at least two regions.

[0062] Wherein, either the laser or the workpiece carrier is fixedly arranged, and the other is capable of reciprocating movement along a direction perpendicular to the extending direction of the laser. Regardless of the movement of the laser or the workpiece to be scanned, it can cooperate with the shading plate to realize the scanning of multiple target areas of the workpiece to be sca...

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PUM

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Abstract

The invention belongs to the technical field of display and in particular relates to a shading structure and laser equipment. The shading structure comprises a first visor group and a second visor group; each of the first visor group and the second visor group comprises at least one visor; and the visors can move relative to each other, so that at least two light-transmitting areas are formed in the shading structure. According to the shading structure disclosed by the invention, subarea-scanning of multiple target areas can be realized at a time, so that the production time can be saved, the production efficiency is improved, utilities and other resources are saved, and the service life of the laser equipment is prolonged.

Description

technical field [0001] The invention belongs to the field of display technology, and in particular relates to a light-shielding structure and a laser device. Background technique [0002] With the rise of flat panel display devices, Low Temperature Poly-Silicon (LTPS) technology has become synonymous with high-quality display devices. In recent years, major panel makers have successively put into production production lines of Dashi-generation low-temperature polysilicon technology. Low-temperature polysilicon technology has developed rapidly and has a bright future. Low-temperature polysilicon technology can not only be used to prepare ordinary liquid crystal display devices (Liquid Crystal Display, referred to as LCD), but also can be used in the production process of organic light-emitting diodes (Organic Light-Emitting Diode, referred to as OLED), flexible (Flexible) backplane. The Excimer Laser Annealing (ELA) process is an important part of the LTPS process. [0003]...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/02G02B5/00H01L21/268H01L21/324
CPCG02B5/00G02B26/02H01L21/268H01L21/324G02F1/1303B23K26/0673B23K26/082G02B5/005G02F1/136209
Inventor 王学勇陈艳王峰江国中
Owner BOE TECH GRP CO LTD