A measuring device and a measuring method for the thickness and the optical constants of ultrathin film

A technology of optical constants and ultra-thin films, which is used in measurement devices, optical devices, material analysis by optical means, etc., to achieve the effect of reducing multiplicity, high measurement accuracy, and improving measurement accuracy

Inactive Publication Date: 2017-12-22
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

[0007] The surface plasmon resonance method obtains the optical parameters of the film by measuring the light intensity information of the reflected light on the film surface, but this method can only obtain the light intensity information

Method used

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  • A measuring device and a measuring method for the thickness and the optical constants of ultrathin film

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Embodiment Construction

[0027] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0028] see first figure 1 , figure 1 It is a block diagram of a measuring device for ultra-thin film thickness and optical constants of the present invention, as can be seen from the figure, the measuring device for ultra-thin film thickness and optical constants of the present invention includes a laser 1, and along the laser output direction of the laser 1 is a beam expander in turn 2. A right-angled plane of 1 / 4 wave plate 3, polarizer 4, compensator 5 and right-angled prism 6, the hypotenuse of this right-angled prism 6 is connected to the plane of plano-convex spherical lens 7 by refractive index matching liquid, this plane The apex of the convex surface of the convex spherical lens 7 is in contact with the film sample 8 to be measured on the glass substrate 9, and al...

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Abstract

The invention provides a measuring device and a measuring method for the thickness and the optical constants of ultrathin film. The method comprises the steps of collecting plasma resonance images under different polarizing angles and analyzing angles, performing analysis to obtain an ellipsometry parameter curve of plasma resonance guide and performing fitting of the ellipsometry parameter curve, and using an optical solution as a measurement result to obtain the thickness and optical constants of ultrathin film. The measuring device and the measuring method have the advantages of online real-time non-contact measurement and high measurement accuracy and cause no damage to the surfaces of to-be-measured samples.

Description

technical field [0001] The invention relates to a thin film, in particular to a measuring device and method for measuring the thickness and optical constant of an ultra-thin film. Background technique [0002] The thickness and optical constants of optical films will directly affect the mechanical, optical, electromagnetic and other properties of the film. Accurate determination of the thickness and optical constants of ultra-thin films is particularly important for studying the optical and electrical properties of ultra-thin films. Therefore, the precise characterization and control of the thickness and optical constants of thin films play a key role in the preparation, analysis and application of thin films. [0003] Due to the small thickness of the ultra-thin film, there is a certain difference in the optical constants of the ultra-thin film compared with the bulk material. At present, people's understanding of the ultra-thin film is not deep enough, so it is difficult ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/06G01N21/552
CPCG01B11/06G01N21/553
Inventor 胡国行单尧谷利元贺洪波曾爱军
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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