Cleaning composition for removing oxide and method of cleaning using the same
A technology for cleaning compositions and oxides, which is applied in the preparation of detergent mixture compositions, cleaning methods using liquids, detergent compositions, etc., and can solve the problems of oxide residues and inability to remove oxides, etc.
Active Publication Date: 2018-01-05
SAMSUNG DISPLAY CO LTD
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Problems solved by technology
[0007] However, when the mask base material is treated by using a laser method, oxides naturally formed when the mask base material is irradiated with laser light cannot be removed by conventional cleaning solutions.
Therefore, there is a problem that oxide remains on the mask base material
Method used
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Examples
Experimental program
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Effect test
preparation Embodiment 1-1
[0106] A cleaning composition for oxide removal was prepared by stirring acid (10 wt% citric acid), oxidizing agent (50 wt% oxygenated water) and water at room temperature for 4 hours.
preparation Embodiment 1-2 to 1-4
[0108] The cleaning compositions for oxide removal of Preparation Examples 1-2 to 1-4 were each prepared in the same manner as in Preparation Example 1-1, but changing the acid and oxidizing agent to those listed in Table 1 .
preparation Embodiment 1-5
[0110] Prepared by mixing acid (5 wt% citric acid), salt (5 wt% sulfate), oxidizing agent (10 wt% oxygenated water), surfactant (1 wt% laurylsulfonate) and water Cleaning composition for oxide removal.
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The present disclosure relates to a cleaning composition for removing an oxide and a method of cleaning using the same. The cleaning composition include one selected from an organic acid, an inorganicacid, and any combination thereof; one selected from an organic salt, an inorganic salt, and any combination thereof; an oxidizing agent; a surfactant; and water.
Description
[0001] priority claim [0002] This application refers to an application earlier filed with the Korean Intellectual Property Office on June 24, 2016 and hereby legally assigned serial number 10-2016-0079293 and an application earlier filed with the Korean Intellectual Property Office on October 27, 2016 and legally assigned a serial number Application No. 10-2016-0141171, which is hereby incorporated herein, and which claims all benefit derived therefrom. technical field [0003] One or more embodiments relate to a cleaning composition for removing oxides and a cleaning method using the cleaning composition. Background technique [0004] Organic light emitting devices (OLEDs) are self-emissive devices with wide viewing angles, high contrast ratios, and short response times. In addition, OLEDs exhibit excellent luminance, driving voltage, and response speed characteristics, and produce full-color images. [0005] The OLED may have a structure in which a first electrode, an ...
Claims
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IPC IPC(8): C23G1/02C23C14/04
CPCC11D11/0029C11D3/2075C11D3/046C23G1/088C11D11/0047C11D3/042C11D1/143C11D3/2086B08B3/08
Inventor 任星淳黃圭焕文英慜文敏浩孔仁浩金昌燮金昊泰陈宰焕黄东旭
Owner SAMSUNG DISPLAY CO LTD