The invention provides a metallographic
corrosion method and a grain size detection method for a
chromium-
silicon alloy target material, and the metallographic
corrosion method comprises the following steps: sequentially
polishing and cleaning the surface of a
chromium-
silicon alloy target material sample to obtain a pretreated
alloy target material; sequentially corroding the pretreated alloy target material by using
hydrochloric acid and
hydrofluoric acid, wherein the
hydrofluoric acid is added on the basis of the
hydrochloric acid; and washing and
drying the corroded alloy target material to obtain the
chromium-
silicon alloy target material to be detected. Metallographic
corrosion is carried out on the chromium-
silicon alloy target material,
hydrochloric acid and
hydrofluoric acid are sequentially adopted as corrosive liquid, corrosion process parameters, inorganic acid types and the use sequence are selected, the corrosion effect is improved, the internal structure of the chromium-
silicon alloy target material is exposed, the grain size is detected in cooperation with detection equipment, and improvement of the
sputtering performance of the target material is facilitated. The uniformity of the
sputtering film and the consistency of the quality of batch products are improved; the method is simple to operate, high in
sample preparation speed, high in detection result accuracy and low in operation cost.