Laser interferometer autofocusing measurement method
A technology of laser interferometer and measurement method, which is applied in the field of mechanical engineering, can solve problems such as limitations, difficulty in manual alignment work, and increased difficulty in error measurement, so as to reduce the dependence on adjustment experience, realize automatic aiming, shorten time and cost Effect
Active Publication Date: 2018-01-12
BEIJING INSTITUTE OF TECHNOLOGYGY
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The Chinese patent discloses "A Collimation Adjustment Method for Linear Length Measurement of Laser Interferometer" (publication number: CN105627913A) and introduces an optical path alignment method for linear length measurement of laser interferometer. Although this method can make the laser head , The interference mirror and the reflector are on a straight line to ensure that the measurement is carried out along a straight line, but it requires that the direction of the laser cannot be changed during the measurement process, and it is difficult to manually align the laser paths of the interferometer and reflector, requiring the operator to Has a fairly high proficiency in light technology
This limits its choice of error measurement location in the CNC machine tool workspace, increasing the difficulty of error measurement
At present, the common method of machine tool error measurement is the diagonal displacement measurement method, such as the 22-line method, but the alignment of the optical path before the laser interferometer measurement must be repeated on each measurement line, and generally it takes at least 0.5h for each alignment time, thus limiting the practical application of this method
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[0039] The present invention will be described in detail below in conjunction with the accompanying drawings and specific examples.
[0040] The present invention comprises interferometer, and described interferometer comprises interferometer 3, reflection mirror 5, laser generator 6 and the optical fiber 7 that connects laser generator 6 and reflection mirror 5, and the step of automatic alignment and measurement is as follows:
[0041] ① Build an optical path measurement system based on laser interferometer and establish measurement coordinates;
[0042] ②In the xy coordinate plane, the interferometer 3 and the reflector 5 of the laser interferometer are continuously aligned in real time;
[0043] ③In the yz coordinate plane, the interferometer 3 and the reflector 5 of the laser interferometer are continuously aligned in real time;
[0044] ④ Measure the spatial positioning error of the machine tool based on steps ② and ③.
[0045] Such as figure 1 and Figure 6 As shown, ...
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The invention relates to the field of mechanical engineering, relates to detection after machining, and particularly relates to a laser interferometer autofocusing measurement method. The laser interferometer autofocusing measurement method adopts an interferometer, wherein the interferometer comprises an interference mirror, a reflector, a laser generator and an optical fiber connecting the lasergenerator and the reflector. When a measuring angle of the lens group changes, refocusing can be completed by controlling the interference mirror and the reflector to rotate at a same angle by meansof a servo motor, manual refocusing is not required, and automatic aiming of the laser interferometer in the measuring process is realized. According to the laser interferometer autofocusing measurement method, alignment can be carried out on an xy plane and a yz plane, thereby ensuring that the measuring system can measure a machine tool in the whole space.
Description
technical field [0001] The invention relates to the field of mechanical engineering, and to detection after machining, in particular to a measurement method for automatic light alignment of a laser interferometer. Background technique [0002] Compensation of spatial errors is an effective method to improve the positioning accuracy of CNC machine tools. The biggest obstacle to the mature application of this technology is the measurement of machine tool errors. There is an essential difference between the measurement of compensation error and the error measurement of machine tool accuracy inspection. The former has completeness requirements for the error measurement, that is, the error measurement must run through the entire processing space. The laser interferometer is the best measuring device for machine tool errors that meet this requirement. It has a large measurement range and high measurement accuracy. The position target of the measurement can be determined at will, ...
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IPC IPC(8): G01B11/00G01B9/02
Inventor 刘志兵冷寿阳张路王西彬程继超黄涛籍永建焦黎颜培赵轲王东前杨洪建
Owner BEIJING INSTITUTE OF TECHNOLOGYGY