Linear guide rail surface defect measurement method

Abstract

The invention provides a linear guide rail surface defect measurement method and relates to the test technology field. According to the method, a pyramid prism moves to acquire linear guide rail scaledisplacement d of a guide rail surface defect, a light beam emitted by a laser interferometer is reflected by the pyramid prism to return along an original path, after light splitting, one light beamis incident to the laser interferometer to acquire interferometer detection displacement l of the guide rail surface defect, another light beam is incident to a camera, light spot conversion is formed through a CCD photosurface, an actual distance s of the pyramid prism in the guide rail surface defect is acquired through calculation, and an actual distance L of the guide rail surface defect is equal to sum of the l and the s. The method is advantaged in that a technical problem of restoration difficulty because of difficulty in position determination during measurement of the linear guide rail surface detect existing in a laser interferometer in the prior art is solved, the error of utilizing the laser interferometer for measurement is eliminated, measurement is more accurate, and accurate basis is provided for restoration of the linear guide rail surface defect.

Description

technical field [0001] The invention relates to the technical field of testing, in particular to a method for measuring concave-convex defects on the surface of a linear guide rail based on a laser interferometer. Background technique [0002] Radiation therapy for tumors is very important for the quality control of radiation therapy equipment. At present, the structure of radiotherapy equipment in most hospitals is as follows: the 3D scanning system is installed in the water tank, the X linear guide rail of the 3D scanning system is horizontally fixed on the upper end of the water tank, and the Y linear guide rail passes through the slidable first slider and the X linear guide rail. Connection, the Z linear guide rail is connected with the Y linear guide rail through the slidable second slider, the Y linear guide rail and the Z linear guide rail fall into the water tank, the scanning probe is installed on the rotating seat, and the rotating seat is connected to the Y linear...

AI Technical Summary

Problems solved by technology

[0003] In order to solve the technical problem in the prior art that it is difficult to determine the exact position of the surface defect measurement of the linear guide rail based on the laser interferometer and bring difficulties to the repair, the present invention provides a method for measuring the surface defect of the linear guide rail, which can detect the position of the surface defect of the linear guide rail accurately. Provide accurate basis for repairing surface defects of linear guide rails

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