Dynamic random access memory array and layout structure and manufacturing method thereof

Abstract

The invention provides a dynamic random access memory array and a layout structure and a manufacturing method thereof. An array region of a semiconductor substrate comprises multiple rows of regions;and each row of the regions comprise multiple active regions, wherein the active regions in the adjacent rows of regions are different in rotation inclination directions, so that the spacings betweenword lines which transversely cross the active regions are close to one another or even the same. Therefore, the directions of the active regions in the dynamic random access memory array are changedfrom the original same-direction inclination with the same extension direction into staggered row different-direction inclination with different extension directions, so that the spacings among effective word lines can be improved and the device performance is improved under the premise of ensuring that the original layout is configured with the same operation function.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a dynamic random access memory array and its layout structure and manufacturing method. Background technique [0002] Integrated circuits have evolved from integrating dozens of devices on a single chip to integrating millions of devices. The performance and complexity of traditional integrated circuits have far exceeded the original imagination. To achieve increases in complexity and circuit density (the number of devices that can fit on a given chip area), the feature size of a device, also called "geometry," has grown with each generation of integrated circuits Getting smaller and smaller. Increasing integrated circuit density not only increases the complexity and performance of integrated circuits, but also reduces costs for consumers. Making devices smaller is challenging because every process in integrated circuit manufacturing has a limit, that is, if a certain p...

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Problems solved by technology

The has 6F 2 The memory of the storage unit area provides some improvements in reducing the area of ​​the storage unit, but there are still some problems in the production of this technology, such as unreasonable word line design

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