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Triaxial MEMS (micro-electromechanical system) gyroscope

A gyroscope, X-axis technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments and other directions, can solve the problems of large size and high cost

Active Publication Date: 2018-03-09
SENODIA TECH (SHANGHAI) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to provide a three-axis MEMS gyroscope, which can solve the problem of large volume and high cost

Method used

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Embodiment Construction

[0032] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0033] In order to enable those skilled in the art to better understand the solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0034] Please refer to Figure 1 to Figure 5 , figure 1 A schematic structural view of a three-axis MEMS gyroscope provided by an embodiment of the present invention; figure 2 for figure 1 The schematic diagram ...

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Abstract

The invention discloses a triaxial MEMS (micro-electromechanical system) gyroscope which comprises an X-axis detection part, a Y-axis detection part and a Z-axis detection part which are arranged in an X-axis direction, wherein the three detection parts are connected with one another by external mass blocks; and the external mass blocks are connected with the three detection parts by a plurality of connecting spring beams. The triaxial MEMS gyroscope can realize X-axis, Y-axis and Z-axis angular velocity detection by utilizing a driving component, so that an internal space of the gyroscope issaved, and the cost is lowered.

Description

technical field [0001] The invention relates to the technical field of MEMS gyroscopes, in particular to a three-axis MEMS gyroscope. Background technique [0002] With the gradual development of various consumer electronics products towards portability and portability, the market demand for smaller gyroscope chips is increasingly urgent. [0003] For the MEMS technology already known in the market, the use of this technology has obtained such as gyroscopes made of semiconductor materials; at present, the MEMS gyroscopes for this market in my country are mainly capacitive resonant gyroscopes, that is, by driving the capacitive mechanical structure to make the mass The mass vibrates in the driving mode, and the change in capacitance caused by the movement of the mass in the detection direction due to Coriolis force is detected by the detection capacitance. [0004] In the prior art, the mechanical part of the three-axis gyroscope is composed of three independent X, Y and Z si...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5621
CPCG01C19/5621
Inventor 邹波王辉刘爽
Owner SENODIA TECH (SHANGHAI) CO LTD