Linear motor

A linear motor and coil technology, applied in electrical components, electromechanical devices, electric components, etc., can solve the problems of limiting the degree of freedom of linear motors and small thrust constant in the Y direction.

Active Publication Date: 2018-03-09
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the Y-direction thrust constant of this linear motor is small, which limits the degree of freedom of the linear motor to a certain extent.

Method used

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Experimental program
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Effect test

Embodiment 1

[0045] Figure 4 It is a schematic diagram of the structure of a linear motor in this embodiment. The electromagnetic structure is mainly composed of three parts, including four back irons 41 and magnet groups (the first magnet group 431, the second magnet group 432, 433, 434, and the third magnet group 435) and the coil set 42 . The second magnet group 433 connects the second magnet group 432 and the second magnet group 434 to form a V-shaped structure with a certain angle. The range of the formed angle is 0°≤α<180°, where α is the angle formed by the second magnet group 432 and the second magnet group 434 . The first magnet group 431 is parallel to the second magnet group 432 , the third magnet group 435 is parallel to the second magnet group 434 , and the first magnet group 431 and the third magnet group 435 are respectively located outside the V-shaped structure.

[0046] Optionally, both the first magnet group 431 and the third magnet group 435 include several cuboid ma...

Embodiment 2

[0073] Figure 8 It is a structural diagram of a two-degree-of-freedom linear motor in Embodiment 2 of the present application. It mainly includes a back iron 41, a magnet group and a U-shaped coil group 42. This structure bends the coil group 42 by 180° to reach the coil group 42. The two arc transitions are completely parallel. At the same time, the magnet group of the motor has also changed. In this example, the fan-shaped magnet has been changed to a common rectangular magnet, which is easy to manufacture and easy to produce.

[0074] Figure 9 It is the electromagnetic structure diagram of the two-degree-of-freedom linear motor in this embodiment. The motor is mainly composed of a first magnet group 431, a second magnet group 432, a third magnet group 433, a fourth magnet group 434, and a fifth magnet group 435. The pole pitches of the group magnet groups are equal, and they are all composed of Helen Baker magnet groups. N and S in the diagram represent the magnetic pro...

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Abstract

The invention provides a linear motor, which comprises a first magnet group, a second magnet group, a third magnet group and a coil group, wherein the second magnet group has a first side wall and a second side wall; the first side wall and the second side wall are connected to together form a V type; the first magnet group and the third magnet group are located outside the first side wall and outside the second side wall respectively; and the coil group comprises a plurality of coils, one end of each coil is accommodated between the first magnet group and the first side wall, and the other end of each coil is accommodated between the third magnet group and the second side wall. In comparison with the traditional linear motor, one more degree of freedom is provided, the motor performance in a driving direction is not reduced, the magnetic field in another direction existing in the traditional linear motor is used, and thrust in two directions is realized.

Description

technical field [0001] The invention relates to the field of motors, in particular to a linear motor. Background technique [0002] Linear motors are also called linear motors and push rod motors. The principle can be regarded as cutting the rotating motor radially, taking its stator as the primary, and the mover as the secondary. When the winding is fed with three-phase current, the original Rotary motion becomes linear motion. Compared with the traditional rotary motor and the workpiece table, the linear motor has no mechanical transmission link, so it has the characteristics of high speed, high precision, zero transmission and no pollution, and is widely used in various processing equipment such as photolithography machines and IC packaging equipment. , and a single device often requires multiple linear motors to achieve multi-degree-of-freedom movement of the device. The traditional linear motor has only one degree of freedom, that is, it only has thrust in one directio...

Claims

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Application Information

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IPC IPC(8): H02K41/02H02K3/28
CPCH02K3/28H02K41/02
Inventor 胡兵杨晓峰陈庆生
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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