A white light interference three-dimensional shape measurement optical system

Abstract

The white light interference three-dimensional shape measurement optical system provided by the invention includes a wide-spectrum light source, a projection lighting mirror group, a beam splitter, a standard mirror, a first orientation adjuster, a second orientation adjuster, a linear drive, a measuring mirror group and Detector array; the wide-spectrum light source emits wide-spectrum illumination light, which is projected onto the surface of the measured object and the surface of the standard mirror after passing through the projection illumination mirror group; the reflected light at the two places is combined by the beam splitter to form a spatial interference light field , is incident on the measuring mirror group and is projected onto the photodetector. The white light interference three-dimensional shape measurement optical system of the present invention can obtain the interference image carrying the shape information of the target object by imaging, and can record and observe the interference image of the target object in real time, so as to obtain the three-dimensional shape information and the two-dimensional shape information of the measured object. Image information provides the data basis.

Description

technical field [0001] The invention relates to the technical field of interference measurement application, in particular to a white light interference three-dimensional shape measurement optical system. Background technique [0002] With the vigorous development of micro-nano technology, the processing objects are also extending in a smaller and more precise direction, accompanied by how to accurately measure the micro-nano structure in three dimensions. In the prior art, since the white light interferometer can perform high-precision measurement on steep microscopic steps, it has become an important tool for micro-nano structure measurement. Most of the existing white light interferometers use the Linnik and Mirau structures. This structure can obtain three-dimensional high-precision measurement information of the measured target, but there are also problems such as small working field of view, short working distance, and ineffectiveness of the measured target. Labeling ...

AI Technical Summary

Problems solved by technology

[0003] The invention aims to solve the technical problems in the prior art that the working field of view is small, the working distance is short, and the measured target cannot be effectively marked, so that the imaging observation ability of the measured target cannot be realized, and a white light interference three-dimensional shape measurement optical system is provided. System, capable of imaging and obtaining interference images carrying target shape information

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