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Fully automatic film-plating machine

A coating machine, fully automatic technology, applied in the field of coating machines, to achieve the effect of saving floor space, effectively utilizing existing space, and improving production efficiency

Active Publication Date: 2018-03-27
上海祖强能源有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a fully automatic coating machine to solve the technical problems in the prior art. It can realize the functions of automatic loading, automatic unloading and automatic return of the substrate rack, realize fully automatic production, and can effectively Use the existing space to effectively solve the problem of transformation of coating equipment that has been put into production

Method used

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Embodiment Construction

[0028] The following describes in detail the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0029] Embodiments of the present invention: as figure 1 Shown, a kind of full-automatic film coating machine comprises loading equipment 7, return device 17 and unloading equipment 18, loading equipment 7 is connected with the inlet end of coating equipment 3, and unloading equipment 18 is connected with the outlet end of coating equipment 3 connection, the conveyor belt 4 runs through the coating equipment 3, and its two ends extend into the loading equipment 7 and the unloading equipment 18 respectively, and ...

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Abstract

The invention discloses a fully automatic film-plating machine including a sheet feeding device (7), a back transmitting device (17) and a sheet unloading device (18); the sheet feeding device (7) isconnected to an inlet end of the film-plating device (3); the sheet unloading device (18) is connected with an outlet end of the film-plating device (3); a conveying belt (4) penetrates through the film-plating device (3), and two ends of the conveying belt respectively extend into the sheet feeding device (7) and the sheet unloading device (18); the back transmitting device (17) is located belowthe film-plating device (3), and two ends of the back transmitting device are respectively located in the sheet feeding device (7) and the sheet unloading device (18). The fully automatic film-platingmachine can realize functions of automatic sheet feeding, automatic sheet unloading and base plate frame automatic back transmitting, realizes fully automatic production, can effectively use a conventional space, and effectively solves the problem of transformation of film-plating devices put into production.

Description

technical field [0001] The invention relates to a coating machine, in particular to an automatic coating machine. Background technique [0002] The production-type magnetron sputtering deposition equipment used in the photovoltaic industry is mainly divided into two types: horizontal magnetron sputtering coating machine and vertical magnetron sputtering coating machine. The main advantage is that the overall film layer is uniform. Good performance, but the disadvantage is that it takes up a lot of space; for ceramic targets, the target slag is inevitable during the process, and the edge of the glass film layer is prone to sparking, which seriously affects the film quality. In order to avoid sparking Occurs, it is necessary to add a substrate rack to block the edge of the glass to solve the problem. When adding a substrate rack, it is necessary to add a return system to realize automatic control. However, due to the limited space in the factory, it is impossible to install a ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56C23C14/35
CPCC23C14/35C23C14/568
Inventor 施栓林
Owner 上海祖强能源有限公司