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Automatic coating machine

A coating machine, fully automatic technology, applied in the field of coating machines

Active Publication Date: 2022-07-01
上海祖强能源有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a fully automatic coating machine to solve the technical problems in the prior art. It can realize the functions of automatic loading, automatic unloading and automatic return of the substrate rack, realize fully automatic production, and can effectively Use the existing space to effectively solve the problem of transformation of coating equipment that has been put into production

Method used

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  • Automatic coating machine
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Embodiment Construction

[0028] The following describes in detail the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, but not to be construed as a limitation of the present invention.

[0029] Embodiment of the present invention: as figure 1 As shown, a fully automatic coating machine includes a loading device 7, a return device 17 and a loading device 18. The loading device 7 is connected to the inlet end of the coating device 3, and the loading device 18 is connected to the outlet end of the coating device 3. Connected, the conveyor belt 4 runs through the coating equipment 3, and its two ends extend into the loading equipment 7 and the unloading equipment 18 resp...

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Abstract

The invention discloses a fully automatic coating machine, comprising a loading device (7), a return device (17) and a loading device (18), the loading device (7) and the inlet end of the coating device (3) connected, the unloading device (18) is connected to the outlet end of the coating device (3), the conveyor belt (4) runs through the coating device (3), and its two ends extend into the loading device (3). 7) and in the unloading equipment (18), the return device (17) is arranged below the coating equipment (3), and its two ends are respectively located at the loading equipment (7) and the lower part. inside the tablet device (18). The invention can realize the functions of automatic film loading, automatic unloading and automatic return of the substrate rack, realize fully automatic production, can effectively utilize the existing space, and effectively solve the problem of reforming the coating equipment that has been put into production.

Description

technical field [0001] The invention relates to a coating machine, in particular to an automatic coating machine. Background technique [0002] The production-type magnetron sputtering deposition equipment used in the photovoltaic industry is mainly divided into two types: horizontal magnetron sputtering coating machine and vertical magnetron sputtering coating machine. Good performance, but the disadvantage is that it occupies a large space; for ceramic targets, the phenomenon of target slag dropping is inevitable during the process, and the edge of the glass film is prone to sparking, which seriously affects the quality of the film. In order to avoid the sparking phenomenon Occurred, it is necessary to add a substrate rack to cover the glass edge to solve the problem, and when adding a substrate rack, a backhaul system needs to be added to realize automatic control, but due to the limited space in the factory area, it is impossible to install a peripheral substrate rack ba...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/56C23C14/35
CPCC23C14/35C23C14/568
Inventor 施栓林
Owner 上海祖强能源有限公司