Unlock instant, AI-driven research and patent intelligence for your innovation.

Worktable shift-in and shift-out device

A workpiece table and removal technology, applied in the field of lithography machines, can solve problems such as excessive torque at the hinge, failure to move in and out, and overturning of the workpiece table.

Active Publication Date: 2018-04-06
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
View PDF5 Cites 4 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Some existing moving-in and moving-out mechanisms are usually crank-slider mechanisms. Due to space constraints, the hinges of the crank-slider mechanism are not coplanar, which causes the phenomenon that the hinges are easily stuck due to excessive torque. The move-in and move-out mechanism is generally used alone, and it is easy to exert excessive pressure on the ground, causing the workpiece table to overturn, so that the move-in and move-out fails

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Worktable shift-in and shift-out device
  • Worktable shift-in and shift-out device
  • Worktable shift-in and shift-out device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] Such as figure 1 As shown, the present invention provides a workpiece table moving in and out device, including a bottom frame 1 for supporting the workpiece table, an air spring 2 arranged on the lower surface of the bottom frame 1, and an air spring 2 for supporting the workpiece table when the workpiece table moves. The air-floating air cushion unit 3 and the moving in and out unit 200 arranged on the bottom frame 1, the moving in and out unit 200 includes:

[0037] The roller unit 4 is used to drive the workpiece table to move. In this embodiment, the roller unit 4 is arranged under the bottom frame 1 to drive the workpiece table out for maintenance, and to move the workpiece table into the lithography machine after the maintenance of the workpiece table is completed. In the machine frame.

[0038] The connecting block 5 is fixed on the bottom frame 1 and used for installing the leaf spring 6 .

[0039] leaf spring 6, one end of which is connected to the connectin...

Embodiment 2

[0051] Such as Figure 8 As shown, different from Embodiment 1, in this embodiment, the moving in and out unit 200 is arranged on two sides of the bottom frame 1 along the moving in and out direction of the workpiece table. The force applying roller 83 is in contact with the frame of the photolithography machine. In this embodiment, there are two groups of moving in and out units 200, and each group of moving in and out units 200 corresponds to a side of the bottom frame 1 along the X axis, so that the layout completely avoids excessive pressure exerted on the ground 9 by the driving rollers 42. Overturning of the workpiece table caused by a large accident improves the stability. The number of moving in and out units 200 is not limited to two groups, as long as they correspond to the two sides of the bottom frame 1 .

Embodiment 3

[0053] Such as Figure 9 As shown, different from Embodiment 1, in this embodiment, the moving-in and moving-out unit 200 is provided with four groups, which are respectively symmetrically distributed on the four corners of the bottom surface of the bottom frame 1 along the moving-in and moving-out direction of the workpiece table, so that the workpiece table It is more stable and safe when moving in and out, and further reduces the pressure applied by each driving roller 42 on the ground 9, further avoids the overturning of the workpiece table, and ensures the safety of the workpiece table moving in and out.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a worktable shift-in and shift-out device which comprises a bottom frame for supporting a worktable, an air spring arranged on the lower surface of the bottom frame, an air cushion unit for generating air flotation for supporting the worktable when the worktable moves, and a shift-in and shift-out unit arranged on the bottom frame, wherein the shift-in and shift-out unit comprises a roller unit for driving the worktable to move, a connecting block fixedly arranged on the bottom frame, a plate spring, one end of which is connected to the connecting block while the otherend of which is connected to the roller unit, and a plate spring deformation driving unit connected to the plate spring, and the roller unit is in contact with the ground by driving the plate spring to deform by moving the worktable. By arranging the plate spring deformation unit, the plate spring deforms, and the roller unit is in contact with the ground when the worktable is shifted in and shifted out to drive the worktable to move without a phenomenon of blocking caused by a too great torque, so that the stability in the worktable shift-in and shift-out process is improved.

Description

technical field [0001] The invention relates to the technical field of photolithography machines, in particular to a workpiece table moving in and out device. Background technique [0002] All kinds of lithography machine worktables need to be moved out of the lithography machine for maintenance and repair when they are running for a period of time or in case of failure. After maintenance, the worktable needs to be moved in again, in order to save time for maintenance and maintenance, and to ensure that the moving in and out In order to ensure the safety of equipment, it is required to realize the automation of moving in and out. [0003] Some existing moving-in and moving-out mechanisms are usually crank-slider mechanisms. Due to space constraints, the hinges of the crank-slider mechanism are not coplanar, which causes the phenomenon that the hinges are easily stuck due to excessive torque. The moving in and out mechanism is generally used alone, and it is easy to exert ex...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/70775G03F7/70975G03F7/70716G03F7/20G03F7/70733G03F7/70758H01L21/0274
Inventor 丛国栋
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD