LED light source exposure device
A technology of LED light source and exposure device, which is applied in photolithography exposure device, microlithography exposure equipment, optics, etc., can solve the problems of expensive exposure device, difficulty in high uniformity of light, large volume of exposure device, etc., to achieve light emission Optimizing efficiency and uniformity, improving light extraction rate, and good compression effect
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[0014] The specific implementation manners of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0015] Such as figure 1 As shown, the LED light source exposure device includes an LED light source 1, a light-transmitting plate 2 and a pressing device 3, the LED light source 1 is arranged on one side of the light-transmitting plate 2, and the bottom of the light-transmitting plate 2 is movable. The micromolecular light guide plate 4, the upper end of the micromolecular light guide plate 4 is provided with a conical prism 5, and the LED light source 1 evenly reflects it to the light-transmitting plate 2 through the conical prism 5, because the micromolecular light guide plate 4 is flexibly connected At the bottom of the light-transmitting plate 2, the light output rate and uniformity can be changed by replacing the micromolecular light guide plate 4 with different angle prisms, different shapes, different densities, and diffe...
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