Gas sensor and preparation method thereof

Abstract

The invention provides a gas sensor and a preparation method thereof. The gas sensor includes a base and a plurality of gas sensitive elements. The base is provided with a plurality of spaced hollowed-out parts. Each gas sensitive element is disposed in one hollowed-out part. The plurality of gas sensitive elements and the plurality of hollowed-out parts are disposed in one-to-one correspondence,and redundant part on the base is excised simultaneously, so that the base becomes hollowed-out. The hollowed-out base has a decreased area, the heating area of a gas sensitive element array packagingstructure is reduced, and then the thermal power consumption of the gas sensitive element array packaging structure is reduced.

Description

technical field [0001] The invention relates to the field of metal oxide gas sensor arrays, in particular to a gas sensor and a preparation method thereof. Background technique [0002] The electronic nose with the gas sensor element array as the core is an analytical instrument that simulates the biological sense of smell, and can be applied to various odor analysis occasions such as food quality inspection and control, environmental monitoring, public safety, medical and health care, and aerospace. Among all the gas sensor types of electronic noses, the metal oxide gas sensor has become the largest and most widely used gas sensor in the world due to its advantages of high sensitivity and fast response time. When the metal oxide forms an array of gas sensor elements (number of elements ≥ 1), the normal working temperature is usually 200°C to 300°C. At present, the mature gas-sensitive film preparation method is screen printing technology, and the size of the substrate carr...

AI Technical Summary

Problems solved by technology

[0003] Based on this, it is necessary to provide a mechanically stable metal oxide gas sensor and its preparation method for the problems of large heating area and high thermal power consumption in the traditional gas sensor packaging structure.

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