In-situ nanoindentation/nanoscratching test device based on bionic piezoelectric driving

Abstract

The invention relates to an in-situ nanoindentation / nanoscratching test device based on bionic piezoelectric driving and belongs to the field of mechatronics precision instrumentation. The in-situ nanoindentation / nanoscratching test device based on bionic piezoelectric driving comprises a precision driving unit, a signal detection and control unit, a clamping unit, a connection unit and a supportunit; the precision driving unit is powered by two bionic piezoelectric driving mechanisms; the signal detection and control unit is composed of a precision grating ruler and a precision pressure sensor; the clamping unit, the connection unit and the support unit comprise a stage to hold a test piece, 65 Mn steel piezoelectric driving mechanism rails, a base and the like. The in-situ nanoindentation / nanoscratching test device based on bionic piezoelectric driving has the advantages that the driving unit is ingenious in design, the device is compact in structure and compatible with scanning electron microscopes and the like, two mechanical tests including in-situ nanoindentation and nanoscratching are performed under in-situ monitoring by the device, and effective means are provided for disclosing mechanical features and damage mechanisms at micro-nano scale.

Description

technical field [0001] The present invention relates to the field of mechatronic precision instruments, in particular to a micro-nano-scale high-precision mechanical performance testing platform, in particular to an in-situ nano-indentation / scribing test device based on bionic piezoelectric drive, which can be used in scanning electron microscopes Next, the micro-nano indentation / scratch mechanical performance test is carried out on the tested piece. The device combines piezoelectric drive technology and in-situ indentation / scribing test technology. The ingenious structural design makes the whole device small in size and regular in periphery. The precise collection and control of load / displacement signals can conduct online observation of the microscopic deformation, damage and destruction process of materials, and provide testing methods for revealing the mechanical properties and damage mechanisms of materials at the micro-nano scale. Background technique [0002] In situ...

AI Technical Summary

Problems solved by technology

my country does not yet have the independent intellectual property rights of in-situ nano-indentation / scratch testing technology, and there is no commercial in-situ nano-indentation / scribing test equipment in my country. lag

In addition, the existing indentation test and scratch test need to be carried out with the help of commercial nano-indentation instrument and nano-scratch instrument respectively. Both methods have the problems of expensive equipment, single test method, and lack of test content.

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