High-precision constant-temperature circulating cooling water device based on dynamic heat capacity filtering

Abstract

The invention provides a high-precision constant-temperature circulating cooling water device based on dynamic heat capacity filtering, and belongs to the field of precise temperature control. A refrigerating function is fulfilled by a refrigerating module based on a semiconductor refrigerating plate array, refrigerating power is accurately and rapidly adjusted by an electric power adjusting mode,an electric heater which has a fin structure and is immersed in circulating water is used for rapidly and accurately adjusting heating power, and the fin structure and the electric heater cooperate with a temperature sensor and a controller to realize accurate and rapid closed-loop adjustment of the temperature of circulating water; and a dynamic temperature fluctuation inhibiting module is addedon the basis of active temperature closed-loop feedback control, part of circulating water is intercepted and stored in a channel on one side of a heat capacity filtering device, by the heat capacity, temperature fluctuation of circulating water in a channel on the other side of the heat capacity filtering device is inhibited, stability of water supply temperature of a cooling-water machine is improved, intercepted circulating water can be updated in real time as needed, and the dynamic performance is achieved.

Description

technical field [0001] The invention belongs to the technical field of precision temperature control, and mainly relates to a high-precision constant temperature circulating cooling water device based on dynamic heat capacity filtering. Background technique [0002] With the continuous improvement of ultra-precision measurement and processing accuracy, thermal pollution has gradually become one of the key factors restricting the further improvement of measurement, processing accuracy and performance. In precision and ultra-precision processing, nearly 40% to 70% of the processing error sources thermal pollution during processing. At present, the circulating fluid temperature control system with water or composite cooling fluid as the circulating medium is widely used to realize high-precision temperature control of ultra-precision measurement, temperature-sensitive parts and areas in processing equipment, or as a high-precision cold source for Preparation of high precision ...

AI Technical Summary

Problems solved by technology

[0008] (2) Existing refrigeration / heating technical solutions such as compressors and heating rods, the actuator itself has a large heat capacity, large thermal resistance and low response speed, resulting in a large thermal hysteresis of the device itself, which further restricts the performance of the device Temperature Control Dynamic Performance

[0011] (2) Also because water, metal balls or phase change materials do not have the ability to adjust their own temperature, factors such as heat dissipation will cause the temperature of media such as water, metal balls or phase change materials to gradually drift over time. Effectively suppress the temperature fluctuation of the circulating fluid, which will instead cause the temperature of the circulating fluid to drift with the temperature of the medium;

[0012] (3) If the temperature setting value of the circulating fluid is changed during the working process, there will be a phenomenon that the temperature of the circulating fluid does not match the temperature of the medium, that is, there is a temperature difference between the circulating fluid and the medium that exceeds the peak value of the temperature fluctuation of the circulating fluid itself, At this time, the medium not only cannot effectively suppress the temperature fluctuation of the circulating fluid, but also causes the temperature of the circulating fluid to deviate from the set point, which becomes a source of interference, and the temperature of the medium needs to be readjusted, and the phase change material only has a maximum temperature within the phase change temperature range. heat capacity, and the phase change temperature is usually a very narrow temperature range, so a phase change material can only suppress the temperature fluctuation of the circulating fluid whose temperature set point is within the phase change temperature range, when the circulating fluid temperature When the set value is other temperature, it is necessary to reconfigure the matching phase change material to achieve the effect of suppressing the temperature fluctuation of the circulating fluid

When using the existing technical solution of the circulating fluid temperature fluctuation suppression device and the constant temperature circulating chiller in series to form a circulating fluid temperature control system, although the temperature stability of the circulating fluid can be improved, the dynamic performance of the circulating fluid temperature control system is greatly limited

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