Integrated trans-MOS insulated gate bipolar transistor structure and manufacturing method thereof
A technology for bipolar transistors and manufacturing methods, which is applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve problems such as device shutdown failure, and achieve the effect of improving the shutdown capability
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[0063] The substrate 113 is p-type, the doped region 111 is n-type, the doped region 121 is p-type, the integrated inversion MOS doped region 102 is n-type, and the integrated inversion MOS doped region 114 is n-type.
Embodiment 2
[0065] The substrate 113 is p-type, the doped region 111 is n-type, the doped region 121 is p-type, the integrated inversion MOS doped region 102 is n-type, and the integrated inversion MOS doped region 114 is n-type.
[0066] The fabrication method of an integrated inversion MOS high turn-off capability IGBT provided by the present invention will be described below.
[0067] A method for manufacturing an integrated inversion MOS insulated gate bipolar transistor structure, comprising the following steps:
[0068] (1) Form the doped region 111 of the active region on the upper surface of the substrate 113, and simultaneously form the integrated inversion MOS doped regions 102 and 104;
[0069] (2) forming a gate electrode 103 on the upper surface of the active region of the substrate 113;
[0070] (3) forming a doped region 121 on the upper surface of the active region of the substrate 113;
[0071] (4) forming an n+ or p+ structure on the upper surface of the active region ...
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