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Cantilever magnetic sensor, as well as preparation method and using method thereof

A magnetic sensor, cantilever beam technology, applied in the manufacture/assembly of magnetostrictive devices, magnetostrictive devices, components of magnetostrictive devices, etc., can solve the problems of the detection accuracy and range of magnetic sensors at room temperature. , to achieve the effect of good application prospect and high sensitivity magnetic field detection

Pending Publication Date: 2018-05-15
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Judging from the current research status, the detection accuracy and range of magnetic sensors at room temperature are usually at the expense of the other.

Method used

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  • Cantilever magnetic sensor, as well as preparation method and using method thereof
  • Cantilever magnetic sensor, as well as preparation method and using method thereof
  • Cantilever magnetic sensor, as well as preparation method and using method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] In this embodiment, the structure of the cantilever beam type magnetic sensor is as follows figure 1 As shown, it includes a base 1 and a cantilever beam 2, one end of the cantilever beam 2 is fixed on the base 1, and the other end is a free end, and a magnet 3 is arranged at the free end of the cantilever beam.

[0031] The base has a cuboid structure and is composed of laminated thin film materials. From bottom to top, there are silicon layer, silicon dioxide layer, aluminum gallium nitride layer and gallium nitride layer. The length of the base is 500 microns, the width is 500 microns, and the thickness is 1000 microns.

[0032] The cantilever has a cuboid structure and is composed of an AlGaN layer and a GaN layer. The cantilever has a length of 250 microns, a width of 40 microns, and a thickness of 4 microns.

[0033] The magnet is a thin film of nickel 100 nanometers thick.

[0034] The preparation method of the above-mentioned cantilever beam type magnetic sens...

Embodiment 2

[0044] In this embodiment, the structure of the cantilever beam type magnetic sensor is as follows figure 2 As shown, it includes two bases 1 and a cantilever beam 2, one end of the cantilever beam 2 is fixed on the base 1, the other end is fixed on the other base, and a magnet 3 is arranged on the cantilever beam.

[0045] The base has a cuboid structure and is composed of laminated thin film materials. From bottom to top, there are silicon layer, silicon dioxide layer, aluminum gallium nitride layer and gallium nitride layer. The length of the base is 500 microns, the width is 500 microns, and the thickness is 1000 microns.

[0046] The cantilever has a cuboid structure and is composed of an AlGaN layer and a GaN layer. The cantilever has a length of 250 microns, a width of 40 microns, and a thickness of 4 microns.

[0047] The magnet is a thin film of nickel 100 nanometers thick.

[0048] The preparation method of the above-mentioned cantilever beam type magnetic sensor ...

Embodiment 3

[0059] In this embodiment, the structure of the cantilever beam type magnetic sensor is as follows image 3 As shown, it includes two bases 1 and a cantilever beam 2. The cantilever beam 2 is in a U-shaped structure. One end of the cantilever beam 2 is fixed on the base 1, and the other end is fixed on the other base, and a magnet 3 is arranged on the cantilever beam.

[0060] The base has a cuboid structure and is composed of laminated thin film materials. From bottom to top, there are silicon layer, silicon dioxide layer, aluminum gallium nitride layer and gallium nitride layer. The length of the base is 500 microns, the width is 500 microns, and the thickness is 1000 microns.

[0061] The cantilever has a cuboid structure and is composed of an AlGaN layer and a GaN layer. The cantilever has a length of 250 microns, a width of 40 microns, and a thickness of 4 microns.

[0062] The magnet is a thin film of nickel 100 nanometers thick.

[0063] The preparation method of the ...

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Abstract

The invention provides a cantilever magnetic sensor. The sensor comprises a base and a cantilever beam, wherein one end of the cantilever beam is fixed on the base, and the other end of the cantileverbeam is a free end; a magnet is arranged on the cantilever beam; and the cantilever beam vibrates under the act of a vibrating source in the working state, the frequency and amplitude of vibration are changed due to the magnetic torque generated by the magnet when an external magnetic field acts on the magnet, and the magnetic field can be detected by detecting the frequency and amplitude of thevibration. The magnetic sensor is simple in structure, and can realize high-sensitivity magnetic field detection.

Description

technical field [0001] The invention relates to a magnetic field detection technology, in particular to a cantilever beam type magnetic sensor, a preparation method and a use method thereof. Background technique [0002] The magnetic sensor is an important part of the sensor, and it is a sensor that converts magnetic signals into electrical signals and other required forms of information output. After nearly a century of development, magnetic sensors play an increasingly important role in all aspects of human social life, and billions of magnetic sensors are put into use around the world every year. With the improvement of magnetic sensors, all walks of life have put forward higher and higher requirements for them, especially for higher and higher detection accuracy. practical application needs. Therefore, it is one of the new development directions of magnetic sensors to have high detection accuracy and wide range of use, and it has attracted more and more attention from ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/06H01L41/12H01L41/47H10N35/80H10N35/00H10N35/01
CPCH10N35/80H10N35/101H10N35/01
Inventor 巫远招刘宜伟李润伟
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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