Double layer anti-sputtering molecular sink structure and its cooling method for ground electric propulsion test
A technology of anti-sputtering and electric propulsion, which is used in the testing of machine/structural components, instruments, measuring devices, etc., and can solve problems such as poor anti-sputtering ability
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0041] Such as figure 1 , figure 2 with Image 6As shown, a double-layer anti-sputtering molecular sink for the sputtering effect in the electric propulsion cabin applied in the vacuum chamber of the present invention includes a double-layer anti-sputtering molecular sink cylinder skeleton 1 and a cylinder cooling tube plate 2 , support pulley 3, anti-sputtering molecular sink 20 at the secondary end and anti-sputtering molecular sink 21 at the end, the anti-sputtering molecular sink includes a cylinder molecular sink matched with the bulkhead, the anti-sputtering molecular sink at the end and the secondary end The anti-sputtering molecule sinker, the end anti-sputtering molecule sinker 21 is fixed on the double-layer anti-sputtering molecular sinking shell frame 1 by bolts, the secondary end anti-sputtering molecular sinking 20 is connected to the double-layer anti-sputtering molecular sinking shell frame An integrated design is adopted, and the distance between the anti-s...
Embodiment 2
[0051] Apply the above-mentioned method of double-layer anti-sputtering molecular subsidence refrigeration, such as figure 2 As shown, specifically:
[0052] (1) Open the coolant control valve 801 of the barrel pipeline, the coolant control valve 802 of the terminal molecular sinking infusion tube, and the coolant control valve 803 of the skeleton pipeline, start the cooling cycle system, and flow to the double-layer anti-sputtering molecular sinking pipeline The coolant is introduced, and at the same time, the pipeline temperature and cooling speed are adjusted by opening the cylinder pipeline coolant control valve 801, the end molecular sink infusion pipeline coolant control valve 802 and the skeleton pipeline coolant control valve 803. When the temperature of the cooling tube plate 2, the anti-sputtering molecular sink 21 at the end and the anti-sputtering molecular sinking 20 at the secondary end reach the minimum, close the cooling liquid control valve 801 of the cylinde...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 


