Automatic center aligning device and method for hot filament CVD (Chemical Vapor Deposition)

Abstract

The invention discloses an automatic center aligning device and method for hot filament CVD (Chemical Vapor Deposition). The device comprises a rack on which a die fixing frame is arranged, wherein hot filament positioning racks are arranged at two sides of the die fixing frame; a sighting telescope mounting rack is arranged at the outside of one hot filament positioning rack, and a sighting telescope is movably arranged on the sighting telescope mounting rack. According to the device, the sighting telescope and a die are arranged on the same axis; the inner hole center of the die is found outthrough the sighting telescope, thus hot filaments can rightly pass through the inner hole center of the die, and as a result, the problems that the hot filaments are easily inclined, the center cannot be found out accurately, the production efficiency is low, and the rejection rate is high, can be effectively solved; a produced coating is high in accuracy; and the yield is greatly increased.

Description

technical field [0001] The invention relates to the technical field of diamond chemical vapor deposition, in particular to an automatic center alignment device and method for hot wire CVD chemical vapor deposition. Background technique [0002] The existing hot wire CVD chemical vapor deposition devices are all manually installed hot wire, and the center is determined by visual observation. Since the hot wire is all observed by the naked eye to see whether the hot wire is in the center of the inner hole of the mold, the deviation is relatively large, and the time spent in production is also It is relatively long and inefficient, which causes a lot of waste of raw materials to the enterprise. After the hot wire is skewed, the inner hole of the drawing die is heated unevenly, resulting in uneven thickness of the produced nano-diamonds, resulting in insufficient roundness of the drawing die, resulting in poor roundness of the wire produced by the die, resulting in a large numbe...

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Problems solved by technology

[0002] Existing hot wire CVD chemical vapor deposition devices install the hot wire manually, and determine the center by visual observation. Since the hot wire is always observed with the naked eye to see whether the hot wire is in the center of the inner hole of the mold, the deviation is relatively large, and the time spent in production is also short. It is relatively long and inefficient, which causes a lot of waste of raw materials for the enterprise

After the hot wire is skewed, the inner hole of the wire drawing die is heated unevenly, resulting in uneven thickness of the produced nano-diamond, resulting in insufficient roundness of the wire drawing die, resulting in poor roundness of the wire produced by the die, resulting in a large number of unqualified products. Especially for some products with relatively small tolerance range, the yield is very low

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