Low-voltage diffusion process of solar cells and solar cells prepared by using it
A solar cell and diffusion process technology, applied in the field of solar cells, can solve the problems of slow oxide layer formation, thin thickness, and low efficiency of solar cells, and achieve the effects of reducing defects, improving uniformity, and improving conversion efficiency
Active Publication Date: 2020-11-10
CSI CELLS CO LTD +2
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Problems solved by technology
[0006] The first object of the present invention is to provide a low-voltage diffusion process for solar cells, so as to alleviate the technical problems of slow formation speed and thin thickness of the oxide layer caused by the low-pressure diffusion process of the prior art and the resulting low efficiency of solar cells
Method used
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Embodiment 1
[0069] This embodiment is a low-voltage diffusion process for solar cells, and its specific process is shown in Table 1. Among them, during the diffusion process in this embodiment, the temperature change curve in the diffusion furnace is as follows figure 1 shown.
[0070] Diffusion process parameter table in the embodiment 1 of table 1
[0071]
Embodiment 2
[0073] This embodiment is a low-voltage diffusion process for solar cells, and its specific process is shown in Table 2.
[0074] Diffusion process parameter table in the embodiment 2 of table 2
[0075]
[0076]
Embodiment 3
[0078] This embodiment is a low-voltage diffusion process for solar cells, and its specific process is shown in Table 3.
[0079] Diffusion process parameter table in the embodiment 3 of table 3
[0080]
[0081]
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The invention provides a low pressure diffusion process of a solar cell and the solar cell prepared by the low pressure diffusion process of the solar cell, and relates to the technical field of solarcells. According to the low pressure diffusion process of the solar cell, pressure returning is performed by using oxygen after completion of the diffusion process and then oxidation is performed. With application of the low pressure diffusion process, the technical problems of slow formation speed of the oxide layer, low thickness and low solar cell efficiency caused by the low pressure diffusion process in the prior art can be alleviated so that the technical effect of enhancing the cell conversion efficiency can be achieved.
Description
technical field [0001] The invention relates to the technical field of solar cells, in particular to a low-voltage diffusion process for solar cells and a solar cell prepared by using the technology. Background technique [0002] As human beings pay attention to climate issues, renewable energy is developing rapidly. Among them, photovoltaic, as an important renewable energy, has achieved leapfrog development in the past ten years. It is a new energy actively developed by developed countries and has endless development potential. [0003] The core step in the production of solar cells is to prepare PN junctions, but the current industrial scale production of solar cells still uses the thermal diffusion method to make junctions. The PN junction method of thermal diffusion is to use heating method to make group V impurities into P-type silicon or group III impurities into N-type silicon. Impurity elements enter the matrix due to thermal diffusion at high temperatures, and th...
Claims
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IPC IPC(8): H01L31/18
CPCH01L31/18Y02P70/50
Inventor 李邦勇马晓林潘岳林费正洪党继东
Owner CSI CELLS CO LTD