Reflective type phase shift digital holography device based on light splitting pupil and method

A digital holography and pupil-splitting technology, applied in the direction of using optical devices, measuring devices, analyzing materials, etc., can solve the problems of poor real-time performance, high cost, complex structure, etc., and achieve the effects of low cost, simple structure, and simple device structure.

Inactive Publication Date: 2018-06-29
HARBIN ENG UNIV
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Problems solved by technology

However, the device adopts the optical focusing point measurement structure, which not only has a complex

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  • Reflective type phase shift digital holography device based on light splitting pupil and method
  • Reflective type phase shift digital holography device based on light splitting pupil and method
  • Reflective type phase shift digital holography device based on light splitting pupil and method

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Embodiment Construction

[0019] Part number description in the figure: 1 light source, 2 collimator beam expander system, 3 first polarizer, 4 quarter wave plate, 5 polarization beam splitter prism, 6 first reflector, 7 first lens, 8 split pupil, 9 objective lens, 10 object to be measured, 11 second mirror, 12 second lens, 13 depolarizing beam splitting prism, 14 second polarizer, 15 image sensor, 16 computer, A is the entrance pupil of the split pupil, B is the light splitter The exit pupil of the pupil.

[0020] figure 1 A reflective phase-shift digital holographic device based on split pupils is shown, including a light source, a collimating beam expander system, a first polarizer, a quarter wave plate, a polarizing beam splitter prism, a first mirror, a first lens, A split pupil, an objective lens, a second mirror, a second lens, a depolarizing beam splitter, a second polarizer, an image sensor and a computer.

[0021] According to the description of the path of light, the light beam emitted by ...

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Abstract

The invention relates to a reflective type phase shift digital holography device based on a light splitting pupil and a method. The method comprises the following steps of enabling parallel incident light to pass through a polarizer and a 1/4 wave plate and form elliptical polarizing light, and splitting into two beams by a polarizing light splitting prism; after one light beam is reflected by a first reflector, radiating to the polarizing light splitting prism; after the other light beam passes through a first lens, an entry pupil of the light splitting pupil and an objective lens, slantwiseradiating to the to-be-tested object in parallel, reflecting by the to-be-tested object, sequentially passing through the objective lens, an exit pupil of the light splitting pupil, a second reflectorand a second lens, and radiating to the polarizing light splitting prism; enabling two light beams combined by the polarizing light splitting prism to pass through a second polarizer, and generate interference on a plane of the image sensor so as to form an interference map; rotating the first polarizer to form a phase shift interference map, collecting by the image sensor, and uploading to a computer; utilizing the computer to calculate the phase of the to-be-tested object. The method has the advantages that the structure is simple; the three-dimensional scanning structure is not needed; themethod is more suitable for the full-field quantitative three-dimensional measuring on the scattered object.

Description

technical field [0001] The invention belongs to the field of digital holographic detection, in particular to a reflective phase-shift digital holographic device and method based on split pupils. Background technique [0002] Digital holography is a non-contact, high-precision full-field quantitative three-dimensional measurement method, which is widely used in optical surface deformation, thickness and cell measurement. Digital holography is based on the principle of interference, and off-axis methods, time phase shift methods, and synchronous phase shift methods are often used. Off-axis interferometry, by introducing an inclination angle between the object light and the reference light, the interferogram generates a carrier wave, thereby separating the items required to recover the phase from the interference items, and using an interferogram to recover the phase of the object to be measured , has strong real-time performance, but the space bandwidth utilization rate of th...

Claims

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Application Information

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IPC IPC(8): G01B11/00G01N21/00G01B9/02
Inventor 钟志赵鸿洁单明广刘彬张雅彬
Owner HARBIN ENG UNIV
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