Pinhole diffraction analysis method based on waveguide effect in point diffraction interferometer

A point diffraction interferometer and analysis method technology, which is applied in the field of pinhole diffraction analysis based on waveguide effect, and can solve the problems of difficult calculation accuracy and long time.

Active Publication Date: 2018-07-06
ZHEJIANG UNIV
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Problems solved by technology

The vector diffraction method treats light as an electromagnetic wave, but the numerical simulation of the electromagnetic field of the three-dimensional structure has high requirements on the computer and takes a long time, and it is very difficult for the three-dimensional simulation of the diffracted light field to achieve the required numerical calculation accuracy , especially for visible light

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  • Pinhole diffraction analysis method based on waveguide effect in point diffraction interferometer
  • Pinhole diffraction analysis method based on waveguide effect in point diffraction interferometer
  • Pinhole diffraction analysis method based on waveguide effect in point diffraction interferometer

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Embodiment

[0067] The present invention is applied to the diffraction analysis of pinholes whose size is equivalent to the wavelength commonly used in visible light point diffraction interferometers, and examples are described as follows.

[0068] The principle of a typical point diffraction interferometer is as follows: Figure 4 , the incident light converges on the pinhole 2 through the converging lens 1. The pinhole structure is etched into a highly absorbent film thick enough so that the pinhole acts as a cylindrical waveguide. The incident light is focused on the front face 2 of the pinhole as shown in (a), reflection and coupling occur, and the light coupled into the pinhole 2 is transmitted to the back face 2 as shown in (b) in the form of the corresponding mode field and exits form diffracted light. The nearly ideal spherical wave generated by diffraction is divided into two parts, one part is the reference light, and the other part is the detection light. After the detection...

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Abstract

The invention discloses a pinhole diffraction analysis method based on the waveguide effect in a point diffraction interferometer and solves a problem of difficulty in realizing both acceleration of the calculation speed of the diffraction light field and accurate analysis on interaction of the light fields of a pinhole wall and in the hole. The method comprises steps that a pinhole is taken as the cylindrical waveguide to handle the conduction effect for the light field, specific steps are as follows, firstly, field distribution of a guided mode matching the incident light field at a rear endsurface of the pinhole is acquired by solving Maxwell's equations, secondly, near-far field transform based on the field equivalence principle is utilized to acquire the diffraction light field at afinite distance from the pinhole from the light field at the rear end surface of the pinhole, and lastly, properties of the diffraction wavefront are acquired by analyzing non-radial components of thediffraction light field. The method is advantaged in that physical concepts and theoretical support are provided by pinhole diffraction analysis based on the electromagnetic field numerical method, and the method is of great significance to accurate analysis the pinhole diffraction wavefront.

Description

technical field [0001] The invention belongs to the field of optics, and in particular relates to a pinhole diffraction analysis method based on a waveguide effect in a point diffraction interferometer. Background technique [0002] Diffraction of holes on the screen is an important problem in the field of optics, its accurate analysis is difficult, and it has various rich technical applications. As a high-precision wavefront phase measurement tool, the point diffraction interferometer uses the diffraction of the pinhole to generate a near-ideal spherical wave as the reference wave of the interferometer. The quality of the diffracted reference wave-the deviation from the ideal spherical wave determines the interferometer measurement. Therefore, it is very necessary to analyze the pinhole diffraction characteristics accurately. [0003] Commonly used pinhole diffraction analysis methods, such as scalar diffraction theory, treat the pinhole as a "stop", and multiply the incid...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B27/42
CPCG02B27/4233G02B27/4266
Inventor 杨甬英白剑王晨陈元恺李瑶
Owner ZHEJIANG UNIV
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