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MEMS sensor controller circuit

A sensor and controller technology, applied in the field of MEMS, can solve problems such as loss of freedom, inability to obtain, and difficulty in closed-loop system design, and achieve the effect of improving system performance, simplifying design, easing the conflict between stability and other system performance

Active Publication Date: 2018-07-06
INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

When the MEMS sensing element converts the perceived physical quantity into an electrical signal, there are often intermediate physical quantities, and these intermediate physical quantities occur inside the sensing element, and the digital closed-loop control circuit cannot be obtained directly, or even cannot be obtained. In this way, when designing a digital closed-loop When the servo control system is used, some degrees of freedom are lost, which brings difficulties to the design of the closed-loop system

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Embodiment Construction

[0016] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0017] An embodiment of the present invention provides a control circuit for a MEMS sensor, and the control circuit together with a MEMS sensor element constitutes a MEMS sensor system. MEMS sensing elements have different basic mathematical models according to their working principles. Specifically, different mathematical system models have different orders. The present invention is especially suitable for MEMS sensing elements who...

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Abstract

The invention relates to the technical field of MEMS, in particular to a MEMS sensor controller circuit. The control circuit comprises a detecting unit, an analog-digital conversion unit, a loop filter unit, a quantization unit, a feedback unit and a mechanical zero adjusting unit, wherein the detecting unit is used for converting an original analog signal from the MEMS sensor into an analog voltage signal, the analog-digital conversion unit is used for converting the analog voltage signal into a digital signal, the loop filter unit is used for adjusting and controlling circuit system parameters, the quantization unit is used for converting bit wide of the digital signal, the feedback unit is used for generating a feedback signal and adjusting a MEMS sensing element, and the mechanical zero adjusting unit is used for receiving signals output from the quantization unit and the analog-digital conversion unit, and adjusting system parameters. According to the MEMS sensor controller circuit, the full freedom identification and tunableness of the MEMS sensor system are achieved by introducing the mechanical zero adjusting unit and improving the loop filter unit, the system stability isincrease, and the system precision is improved.

Description

technical field [0001] The invention relates to the technical field of MEMS, in particular to a MEMS sensor controller circuit. Background technique [0002] MEMS technology is developed on the basis of traditional semiconductor technology. MEMS sensors have the advantages of small size and low energy consumption, and are widely used in medical, automotive, Internet of Things and other fields. [0003] MEMS sensors are usually composed of sensitive detection units, control circuits, and packaging enclosures. The existing MEMS sensor control circuit is divided into a closed-loop structure and an open-loop structure from the structure, and is divided into an analog signal output and a digital signal output from the output signal. The sensor control circuit of the open-loop structure is not as good as the control circuit of the closed-loop structure in terms of stability, linearity, and dynamic range; the control circuit of the digital signal output is convenient for subsequen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/042
CPCG05B19/0423G05B2219/21137
Inventor 熊兴崟韩可都李宗伟俞度立
Owner INST OF GEOLOGY & GEOPHYSICS CHINESE ACAD OF SCI
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