Silane tail gas treatment method containing chlorosilane

Abstract

The invention discloses a chlorosilane-containing silane tail gas treatment method, comprising the steps of (1) subjecting chlorosilane to primary condensation; (2) subjecting chlorosilane to secondary condensation; (3) performing separating to obtain chlorosilane; (4) stabilizing pressure with a gas pressure stabilizer tank; (5) combusting silane gas. The chlorosilane-containing silane tail gas treatment method has the advantages that chlorosilane in silane tail gas is recycled, the recycled chlorosilane is reusable for silane production systems, material loss is reduced, and production costis reduced; a combustion system herein has multiple combustion heads, the combustion system has positive pressure, the combustion heads are exposed in air, an anti-irradiation heat-insulating hood isarranged above, and air around a combustor is gathered around the combustor via the chimney effect; compared with traditional combustors, the combustion system allows silane tail gas and air to be mixed more sufficiently, so that combustion efficiency is significantly improved and silane tail gas treatment quantity is increased.

Description

technical field [0001] The invention relates to a method for treating silane tail gas, in particular to a method for treating silane tail gas containing chlorosilane. Background technique [0002] At present, the related technologies of silane tail gas treatment mainly focus on the waste gas generated during the application of silane as a product, such as the waste gas generated during the production of solar cells, integrated circuits and electronic components. The traditional silane tail gas treatment system is generally carried out in the silane combustion tower. The silane combustion tower is a closed space. The silane tail gas and air are respectively passed into the silane combustion tower through pipelines, and are mixed and burned by molecular diffusion. During the combustion process, if Failure of the air supply will cause a large amount of silane gas to accumulate, and a large amount of silane tail gas will be discharged into the air in a short period of time. The ...

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Problems solved by technology

The traditional silane tail gas treatment system is generally carried out in the silane combustion tower. The silane combustion tower is a closed space. The silane tail gas and air are respectively passed into the silane combustion tower through pipelines, and are mixed and burned by molecular diffusion. During the combustion process, if Failure of the air supply will cause a large amount of silane gas to accumulate, and a large amount of silane tail gas will be discharged into the air in a short period of time. The combustion will be violent, and flash explosion may occur, posing a safety hazard. At the same time, the combustion efficiency is low

[0003] The use of a torch system to treat silane tail gas, although it can ensure the safe production of the factory, but during the combustion process of silane tail gas, solid particles will be generated, and some solid particles with small mass will be discharged into the atmosphere along with the air flow, causing environmental pollution; Part of the solid particles with large mass will settle down, block the combustion hole, cause the burner to be blocked, and the failure rate of the flare system is high. The silane tail gas in the radiation protection heat shield cannot be fully burned and is directly discharged into the atmosphere, polluting the environment

[0004] At present, there are few related technologies for the treatment of waste gas generated in the process of preparing silane, especially the silane tail gas containing chlorosilane in the production process of silane prepared by reactive distillation

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