Spatial phase-shifting interferometer

Abstract

The invention provides a spatial phase-shifting interferometer. The interferometer comprises laser emission mechanisms, a laser receiving mechanism, an interference device, an imaging lens, a first coaxial line and a second coaxial line, each laser emission mechanism comprises a laser and a beam-expanding shaping prism, the laser receiving mechanism, the interference device and the imaging lens are distributed on the first coaxial line, the imaging lens and the laser receiving mechanism are arranged on the front side and the rear side of the interference device respectively, and the laser emission mechanisms are arranged on the second coaxial line and arranged on the two sides of the imaging lens respectively; when the laser emission mechanisms emit laser beams, the laser beams are reflected after shining on the surface of a target object, form two ways of light beams after passing through the imaging lens and the interference device in sequence along the first coaxial line, and then are received and treated by the laser receiving mechanism. The spatial phase-shifting interferometer is simple in structure and rapid in image information collection.

Description

technical field [0001] The invention relates to an optical interference instrument, in particular to a space phase shift interferometer. Background technique [0002] The laser speckle is used as the carrier of the field change information of the measured object, and the relevant fringes of the interference speckle field generated by the measured object after being irradiated by the laser are used to detect the phase change between the front and rear of the two beams. One laser beam is expanded by the lens and Projected onto the surface of the object to be detected, the reflected light interferes with the reference beam directly projected from the laser to the camera, and a speckle field and a series of speckle images are generated on the illuminated surface; when the object moves, these speckles will Changes occur accordingly, and these changes represent the displacement field changes or deformation information on the surface of the measured object; use CCD (charge-coupled ...

AI Technical Summary

Problems solved by technology

[0004] The method of phase shift is usually divided into time phase shift and space phase shift. The time phase shift is to calculate the phase by collecting several pictures in the time series; the space phase shift is to collect a picture at the same time, which contains different Spatial phase information, the phase can be calculated with one image; time phase shift technology has the following disadvantages: complex structure, many distribution of optical components; long image acquisition time, which is not conducive to rapid detection

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