Unlock instant, AI-driven research and patent intelligence for your innovation.

Device and method for measuring surface shape of conical mirror and cylindrical mirror

A technology of measuring device and measuring method, applied in the field of interferometric measurement, to achieve the effects of low cost, removal of synchronous error and asynchronous error, and simple measurement system

Active Publication Date: 2018-08-03
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
View PDF10 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] At present, there is no general-purpose, high-precision, low-cost measuring device and method for axicon surface shape

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Device and method for measuring surface shape of conical mirror and cylindrical mirror
  • Device and method for measuring surface shape of conical mirror and cylindrical mirror
  • Device and method for measuring surface shape of conical mirror and cylindrical mirror

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0045] The present invention will be further described below with reference to the drawings and embodiments, but this embodiment does not limit the protection scope of the present invention.

[0046] figure 1 It is a schematic diagram of the structure of the improved measuring device for the cylindrical mirror surface of the conical mirror of the present invention. It can be seen from the figure that the measuring device for the conical mirror and the cylindrical mirror surface of the present invention includes a wavefront measuring interferometer 1, an interferometer support 2, and a precision rotation. The stage 12 and the turntable real-time measurement system; the wavefront measurement interferometer 1 is installed on the interferometer bracket 2; the turntable real-time measurement system includes the auxiliary measurement cylinder 3 and 5 precision displacement measurement sensors,

[0047] The auxiliary measuring cylinder 3 is mounted on the precision rotating table 12. The c...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A device and method for measuring the surface shape of a conical mirror and a cylindrical mirror are provided. The measuring device comprises a wave surface measuring interferometer, an interferometerbracket, a precise rotating table and a turntable real-time measuring system, wherein the wave surface measuring interferometer is mounted on the interferometer bracket; the turntable real-time measuring system comprises an auxiliary measuring cylinder and five precise displacement measuring sensors. The device has the characteristics of high precision, low cost, and high universality, can simultaneously measure the surface shape information of a component to be measured and the main shaft rotation error of the precise rotary table, and removes a synchronization error and an asynchronous error.

Description

Technical field [0001] The invention relates to the field of interference measurement, in particular to a cone mirror, cylindrical mirror surface shape measuring device and a measuring method. Background technique [0002] Cone mirror is a special rotationally symmetric aspheric surface. A point light source on its axis will form a series of image points along its axis. It can also transform a collimated beam into a ring beam. These characteristics have been applied to high resolution Optical coherence tomography, cold atom capture, lithography machine ring illumination, etc. The cylindrical mirror is also a rotationally symmetric aspheric surface, which can focus the collimated beam into a line. However, the deterministic optical processing of conical mirrors and cylindrical mirrors has been limited by their surface shape detection technology, which has affected their application scope and cost. The difference between the conical mirror and the cylindrical mirror is that the g...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 严焱唐锋王向朝卢云君彭常哲董冠极
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI