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Ultraviolet exposure device for manufacturing biochip

A biochip and exposure device technology, which is applied in the direction of photolithography process exposure device, microlithography exposure equipment, etc., can solve the problems of high purchase cost, difficulty in general use, and high cost, so as to reduce the production cost, No cost burden, the effect of reducing the size

Inactive Publication Date: 2018-08-03
KOREA INST OF MACHINERY & MATERIALS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, since the existing exposure apparatus includes a structure for aligning a plurality of masks, which is bulky, the places where the apparatus can be used are limited, and the cost required for manufacturing is high, so its purchase requires a lot of money. , so it is difficult to use universally

Method used

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  • Ultraviolet exposure device for manufacturing biochip
  • Ultraviolet exposure device for manufacturing biochip
  • Ultraviolet exposure device for manufacturing biochip

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Embodiment Construction

[0037] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, in describing the present invention, descriptions of known functions or structures are omitted in order to clarify the gist of the present invention.

[0038] In order to clarify the present invention, parts irrelevant to the description are omitted, and the same reference numerals are used for the same or similar structural elements throughout the specification. In addition, the size and thickness of each structure shown in the drawings are arbitrarily shown for convenience of description, and therefore the present invention is not limited to those shown in the drawings.

[0039] figure 1 It is a perspective view showing the appearance of the ultraviolet exposure apparatus 100 for producing a biochip according to one embodiment of the present invention.

[0040] figure 2 It is a perspective view showing a state in which the mounting part 120 of the...

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Abstract

The present description relates to an ultraviolet exposure device for manufacturing a biochip, wherein the volume taken up by the device is reduced so that the device can be used even in a small space, the cost required for the manufacture of the device can be reduced so that the device can be generally used without a heavy cost burden, and the device enables the manufacture of a master mold whichis used to manufacture a biochip having a microstructure.

Description

technical field [0001] This description relates to an ultraviolet exposure device for biochip production, and more specifically, relates to an ultraviolet exposure device for biochip production that can be used for production of biochips having a fine structure and can be used regardless of location and cost . Background technique [0002] With the development of modern medical technology, not only the technology of treating human diseases, but also the technology of diagnosing diseases has been developed together. The technology of diagnosing diseases was performed in the form of observation or interrogation from the outside of the human body in the past, but since the time when the inside of the human body can be observed through X-ray imaging, it has been greatly developed. Recently, in addition to using large-scale equipment such as Magnetic Resonance Imaging (MRI) and Computed Tomography (CT) to diagnose diseases, it is also possible to easily observe the human body by...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/20
Inventor 郭凤燮郑錤洙李强昈朴庆泽
Owner KOREA INST OF MACHINERY & MATERIALS