Double Michelson interferometer type sound detecting sensor
A sensor and interferometric technology, applied in the direction of measuring ultrasonic/sonic/infrasonic waves, instruments, measuring devices, etc., to achieve good market application prospects, high measurement sensitivity, and wide application range
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[0028] In order to make the solution of the present invention clearer, the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments:
[0029] Such as Figure 1~3 As shown, a dual-Michelson interferometric acoustic sensor includes a probe 1, a dust cover 2, a bottom plate 3, a prism 4, a mirror 5, a substrate 6, a C-Lens fiber optic collimator lens 7, an optical cable 8 and a diaphragm 9. The probe 1 adopts a solid rotary structure. One end of the probe 1 is provided with a flange for fitting the dust cover 2. The flange is provided with a coaxial through hole for installing the diaphragm 9; the other end of the probe 1 is provided with a cross-shaped step. The groove, the bottom end of the cross-shaped step groove is bonded with a reflective and light-splitting prism 4, the side wall of the cross-shaped step groove is bonded with a reflector 5, and the step of the cross-shaped step groove is fixedly connected to t...
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