Low temperature two-dimensional vacuum sample stage

Abstract

The invention belongs to the field of ultrahigh vacuum devices, and concretely relates to a low temperature two-dimensional vacuum sample stage. The low temperature two-dimensional vacuum sample stageis characterized in that the powers of two rotary driving motors are respectively transmitted from a first nonmagnetic rotating steel wire and a second nonmagnetic rotating steel wire to a sample stage rotating mechanism, and the first nonmagnetic rotating steel wire transmits torque to the sample stage rotating mechanism in order to realize the in-plane rotating motion of the sample stage; the second nonmagnetic rotating steel wire transmits torque to the sample stage rotating mechanism to realize the inclination swinging of the sample stage; the lower end of a cooling sleeve is in contact with the sample stage rotating mechanism, and a cold source inlet is arranged at the upper end of the cooling sleeve to keep the sample stage rotating mechanism in a low temperature state; and the sample stage rotating mechanism is covered with a low temperature shield to prevent temperature diffusion. The low temperature two-dimensional vacuum sample stage has the advantages of simple structure, convenience in production, low cost, and meeting different use requirements, and can work in an ultralow temperature environment while maintaining an ultrahigh vacuum environment.

Description

technical field [0001] The invention belongs to the field of ultra-high vacuum equipment, and in particular relates to a low-temperature two-dimensional vacuum sample stage. Background technique [0002] There are different degrees of vacuum, which can be generally divided into low vacuum, medium vacuum, high vacuum, ultra-high vacuum and extremely high vacuum. In the field of ultra-high vacuum, the presence of gas molecules, including molecules adsorbed on the walls of vacuum containers, is almost negligible, and the maintenance time of solid clean surfaces can also be relatively extended. Therefore, in extreme environments such as vacuum and low temperature, research in the fields of surface science, semiconductor applications, and nuclear fusion devices can be carried out. Research on these topics plays an important role in solving current problems faced by human beings, such as the environment, energy, and new materials. role. Therefore, the development of equipment th...

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Problems solved by technology

[0003] In the prior art, for example, in the field of optoelectronic detection, there is no good solution to solve the problem of multi-dimensional movement in ultra-high vacuum and extreme low temperature environments. Generally, the movement of the sample stage is controlled by the manipulator, but the control algorithm of the manipulator is complicated. , the cost is high, and the electronic components cannot adapt to the extreme low temperature environment, so it is imminent to develop a device that can realize multi-dimensional movement in extreme environments

[0004] At present, my country's high-end vacuum equipment R & D and production and technology popularization are far from meeting the needs, let alone have the strength to compete directly with international competitors. A considerable proportion of the country's annual scientific research funds are used to purchase foreign scientific research equipment , which not only makes our country's scientific research controlled by others, but also makes it difficult to have original scientific research results

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