Unlock instant, AI-driven research and patent intelligence for your innovation.

Using a tilted object light wave and an interferometer with a Fizeau interferometer objective

An interferometer, object light wave technology, applied in the field of interferometers, can solve the problems of long measurement time, difficult to use interferometers, etc., and achieve the effect of sensitivity advantage

Active Publication Date: 2020-06-05
UNIV STUTTGART
View PDF8 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Phase shifts lead to long measurement times through sequential mode
In addition, such methods are susceptible to vibrations, which makes it difficult to use interferometers, for example, in manufacturing

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Using a tilted object light wave and an interferometer with a Fizeau interferometer objective
  • Using a tilted object light wave and an interferometer with a Fizeau interferometer objective
  • Using a tilted object light wave and an interferometer with a Fizeau interferometer objective

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0047] in particular, figure 1 A known oblique wave interferometer is shown, which largely corresponds to the interferometer described in DE 10 2006 057 606 B4.

[0048] The beam of a coherent linearly polarized laser source 1 passes through a λ / 2 plate 2 and is split into a test beam and a reference beam by a polarization beam splitter 3 . The test beam is broadened by a beam broadening means such as a Kepler telescope consisting of a microscope objective 4 and a collimating lens 5 . The broadened light beam illuminates an array 6 of point light sources, which consists of a substrate on which a microlens array is mounted on the front side facing the microscope objective and a pinhole diaphragm array 7 is mounted on the back side opposite its front side.

[0049] The array of pinhole diaphragms 7 is movable relative to the array of point sources of light and in one position opaquely covers every other light source in each row and column, being transparent to the remaining poi...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to an interferometer for planar measurement of optically smooth surfaces, having means for illuminating a surface area with a plurality of discrete object light waves coming from different directions, and having a detector which will reflect at the surface A device in which an object light wave is superimposed on a reference wave coherent with multiple object light waves to form an interferogram. The interferometer is characterized in that it is arranged to simultaneously irradiate the surface with a plurality of object light waves and to generate a reference wave through a Fizeau beamsplitter plate or a Fizeau objective lens, and that the interferometer has an interferometer arranged upstream of the detector (14) on the optical path. An instrument diaphragm (12) and imaging optics, wherein the interferometer diaphragm is located in or just outside the Fourier plane of the imaging optics and filters object light waves reflected by the surface. An independent claim relates to a method for planar measurement of optically smooth surfaces.

Description

technical field [0001] The invention relates to an interferometer and method for planar measurement of optically smooth surfaces. Background technique [0002] Such interferometers are also known as tilted wave interferometers (TWI). The technical basis of the invention is a method for measuring aspheric and free-form surfaces invented by the Institute of Technical Optics (ITO) of the University of Stuttgart. It uses a set of mutually tilted wavefronts to locally compensate for the deviation of the test volume from the best-fit sphere. The device usually consists of a number (for example 49) of mutually inclined wavefronts and basically differs from other interferometers in that it uses only two inclined wavefronts e.g. in order to generate two orthogonal mutually polarized wavefronts forward. See eg WO2004 / 051183. An exemplary embodiment is described in DE 10 2006 057 606 B4. The oblique wave interferometer presented here has a point light source array (PLQA) and an op...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02G01B11/24
CPCG01B9/02007G01B9/02027G01B9/02032G01B9/02039G01B9/02057G01B2290/50G01M11/005G01M11/0207
Inventor 戈兰·贝尔克里斯托夫·普鲁斯沃尔夫冈·奥斯滕
Owner UNIV STUTTGART