Ultra-high-voltage pressure sensor

Abstract

The invention relates to an ultra-high-voltage pressure sensor comprising a sensor housing, a leading-in nozzle, a first membrane, a pressure sensitive component, a second membrane, a signal processing circuit board and a back cover. A leading-in nozzle mounting slot is formed in the top of the sensor housing; a circular truncated cone type through hole is formed in the middle of the sensor housing; and a back cover mounting slot is formed in the bottom of the sensor housing. A first membrane mounting base protruding upwardly is arranged at the top of the through hole; and the first membrane is fixedly installed at the first membrane mounting base by a fixed member. A second membrane mounting base protruding downwardly is arranged at the bottom of the through hole; and the second membraneis fixedly installed at the second membrane mounting base by a fixed member. The pressure sensitive component is installed at the middle part of the bottom of the second membrane. The ultra-high-voltage pressure sensor has the following beneficial effects: with a decompression cavity, the elastic deformation of the second membrane is reduced and thus the sensing signal of the pressure sensitive component arranged at the bottom of the second membrane changed linearly with the deformation of the second membrane, so that the high-voltage testing need is met.

Description

technical field [0001] The invention relates to the field of pressure sensors, in particular to an ultra-high pressure pressure sensor. Background technique [0002] A pressure sensor is a device or device that can sense pressure signals and convert the pressure signals into usable output electrical signals according to certain rules. A pressure sensor usually consists of a pressure sensitive element and a signal processing unit. [0003] In recent years, with the rapid development of new high-pressure loading technologies, ultra-high pressure measurement has played an important role in both military and civilian applications. Due to the increasing demand and higher requirements for high-pressure testing, ultra-high pressure testing technology is also In constant development. However, the elastic deformation range of the material used to make the diaphragm is limited. If the pressure exceeds the elastic deformation range of the diaphragm, the diaphragm will be plastically ...

AI Technical Summary

Problems solved by technology

However, the elastic deformation range of the material used to make the diaphragm is limited. If the pressure exceeds the elastic deformation range of the diaphragm, the diaphragm will be plastically deformed, and the pressure sensor will be damaged; at the same time, the sensing signal of the pressure sensitive element changes linearly with the deformation. There is a limit, beyond this limit, the sensing signal of the pressure sensitive element will no longer change linearly, resulting in inaccurate measurement

For some specific pressure tests, since the required pressure loading area is very small, it is not suitable to directly increase the cross-sectional area of ​​the diaphragm to reduce the internal stress of the component.

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