Flexibility-adjustable Shadow Moire measurement system and method

Abstract

The invention discloses a flexibility-adjustable Shadow Moire measurement system and method. The flexibility-adjustable Shadow Moire measurement system integrates flexibility adjustment, phase-shifting technology improvement and Shadow Moire measurement extension; the flexibility-adjustable Shadow Moire measurement system includes a computer, a CCD camera, a servo motor, a stepping motor, a rotation motor, a lens collimation system, an adjustable light source, a stage, a sinusoidal grating and a measured object; the whole flexibility-adjustable Shadow Moire measurement system is controlled bythe computer, therefore, measurement flexibility and light intensity are adjusted, fringes are subjected to phase shifting, and corresponding deformed fringe patterns are obtained; image processing software is used for analyzing and processing the obtained deformed fringe patterns, according to the quality of the fringe patterns, the measurement flexibility is adjusted, phase shifting calculation,phase unwrapping calculation and the like are conducted, and finally, morphology information of the surface of the measured object is obtained and displayed on the computer. According to the flexibility-adjustable Shadow Moire measurement system and method, through a flexibility adjustment mechanism, adjustment of incident light angles is achieved, the flexibility is further reasonably matched with the measured surface, complex surfaces can be rapidly measured, the structure is simple, and the measurement precision can be effectively improved.

Description

Technical field [0001] The invention belongs to the technical field of optical measurement, relates to surface non-contact three-dimensional optical measurement, and specifically relates to a Shadow Moiré measurement system and method with adjustable sensitivity. Background technique [0002] Shadow Moiré non-contact three-dimensional optical surface measurement technology uses light to be projected on the grating to produce a shadow grating on the surface of the measured object, and the shadow grating is deformed by the modulation of the surface shape of the measured object, and the shadow is observed from the CCD camera The grating and the grating overlap to form moiré deformed fringes. The deformed fringe contains the surface information of the object. The measured surface topography information is obtained by analyzing the deformed fringe, and the phase shift technology is used to improve the measurement accuracy. Shadow Moiré optical 3D measurement technology has the advant...

AI Technical Summary

Problems solved by technology

[0003] In the traditional Shadow Moiré measurement, the structural installation and relative position accuracy of the measurement system are highly required to ensure the stability and accuracy of the measurement sensitivity. The measurement sensitivity of the measurement system is fixed based on the system structure, which limits the measurement accuracy and measurement resolution. rate, especially for the measurement of complex surfaces, the fixed measurement sensitivity cannot ensure the reliability of the measurement

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