Method for converting coordinates of A-S universal sample table into coordinates of AFM sample table

Abstract

The invention provides a method for converting the coordinates of an A-S universal sample table into the coordinates of an AFM sample table. The method comprises the following steps: (1) placing an A-S universal sample table provided with a sample in an SEM to observe the A-S universal sample table, and finding out a target area; (2) recording the target coordinates of the area; (3) transferring the A-S universal sample table to the AFM sample table, and obtaining the new coordinates of the target coordinates in the AFM sample table. According to the method provided by the invention, the method for converting the coordinates of the A-S universal sample table into the coordinates of the AFM sample table is provided. The method solves the problem that the coordinates of a target point need to be repositioned after the A-S universal sample table is transferred to the AFM sample table in the prior art. As a result, the combination of the SEM and the AFM is achieved. The working efficiencyof the AFM is greatly improved, and the cognition of researchers to nanometer materials is greatly enriched.

Description

technical field [0001] The invention relates to a method for converting the coordinates of the A-S universal sample stage into the coordinates of the AFM sample stage. Background technique [0002] The atomic force microscope is a testing instrument that obtains the three-dimensional topography of the sample surface according to the magnitude of the interaction force between the probe and the sample. powerful tool for the comprehensive nature of the district. However, AFM is limited by the deformation range of piezoelectric ceramics, and cannot realize the continuous change of the target field of view from macroscopic to microscopic like electron microscopes. The only way to find a suitable target area during testing is to rely on the optical microscope that comes with the AFM instrument, which has a low resolution. In nanomaterial testing, the target area cannot be effectively identified, and it often takes a lot of time to find the test target, which seriously affects the...

AI Technical Summary

Problems solved by technology

[0006] At this stage, there are also instrument sets equipped with a positioning function on the market that can reproduce a specific area with sub-micron precision in the same brand of SEM and AFM, but this positioning depends on the sample holder of the brand. When the sample is taken from the After the sample pedestal is removed and put back again, the positioning fails

Images