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a graphical method

A technology of graphic and composition process, applied in the field of graphic, to achieve accurate graphic effect

Active Publication Date: 2021-01-22
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] The inventors of the present invention found that one of the difficulties in the application of the existing nanoimprint technology in the display field is the realization of graphics. The display field needs to realize nanographics in a specific area, but it is difficult for the existing nanoimprint technology to achieve a specific area. Graphical

Method used

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Embodiment Construction

[0044] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0045] Those skilled in the art will understand that unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the word "comprising" used in the description of the present invention refers to the presence of said features, integers, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, Integers, steps, operations, elements, components, and / or groups thereof. It will be unders...

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Abstract

The embodiment of the invention provides a graphically representing method. The objective of the invention is to precisely achieve graphical representation of a special region. The method comprises steps of making at least one protruding structure on a substrate, wherein the position of the protruding structure corresponds to a to-be-graphically represented region; forming a film layer on each protruding structure; and using a nano-imprinting template to carry out graphical representation on the film layer. According to the invention, before the step of carrying out graphical representation onthe film layer by using the nano-imprinting template, at least one protruding structure is making on the substrate, so compared with the prior art, it is achieved that nano-imprinting cannot be achieved in the region out of the protruding structures and graphical representation of special regions is precisely achieved.

Description

technical field [0001] The invention relates to the technical field of nanoimprinting, in particular to a patterning method. Background technique [0002] Nanoimprint technology is a low-cost and fast method to obtain replicated structures at the nanoscale, which can repeatedly prepare nano-patterned structures on large-area substrates in large batches. [0003] Nanoimprint technology realizes pattern transfer through physical deformation of resist, and its resolution is not limited by factors such as light wave wavelength, which can break through the resolution limit of traditional photolithography process, and also has low cost and large aspect ratio. Etc. The reported nanofabrication accuracy has reached 2 nanometers, which exceeds the resolution that can be achieved by traditional photolithography. [0004] The current commonly used nanoimprinting technology is divided into the following three steps: [0005] The first step: template processing; this step generally us...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/308
CPCH01L21/308
Inventor 赵承潭李鑫黄华
Owner BOE TECH GRP CO LTD
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