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PFM-based lithium niobate nano-domain processing and imaging method

An imaging method, lithium niobate technology, applied in nanotechnology, chemical instruments and methods, crystal growth, etc., can solve problems such as difficult to obtain nanodomain structure

Inactive Publication Date: 2018-09-21
CHONGQING UNIVERSITY OF SCIENCE AND TECHNOLOGY +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] It is difficult to obtain nano-domain structure by traditional external electric field polarization method

Method used

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  • PFM-based lithium niobate nano-domain processing and imaging method
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  • PFM-based lithium niobate nano-domain processing and imaging method

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Embodiment Construction

[0017] One, the present invention will be further described below in conjunction with embodiment.

[0018] A kind of lithium niobate nano-domain processing and imaging method based on PFM is carried out according to the following steps:

[0019] Step 1, scanning the surface of the lithium niobate thin film with a conductive probe applying a first AC voltage, the voltage value of the first AC voltage is less than the inversion voltage value of the iron domain of lithium niobate;

[0020] The lithium niobate film is a lithium niobate single crystal film polarized unidirectionally along the c-axis crystal axis;

[0021] In order to ensure the removal effect of the surface charge of the film, a conductive probe can be used for multiple scans;

[0022] Step 2, using a conductive probe that applies a first DC voltage to perform nano-domain processing on the scanned lithium niobate film, and the voltage value of the first DC voltage is greater than or equal to the reversal voltage v...

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Abstract

The invention discloses a PFM-based lithium niobate nano-domain processing and imaging method. The method comprises the following steps: firstly, scanning the surface of a lithium niobate film by utilizing a conducting probe for applying first alternating current voltage; secondly, performing nano-domain processing on the scanned lithium niobate film by utilizing a conducting probe for applying first direct current voltage; and finally, performing nano-domain structure imaging on the lithium niobate film after domain processing by utilizing a conducting probe for applying second alternating current voltage, and simultaneously, applying second direct current voltage to the surface of the lithium niobate film. The method disclosed by the invention has the effects that before lithium niobatenano-domain processing, the alternating current is applied, and then the forming probability of the lithium niobate nano-domain can be improved, thereby increasing the capacity of a lithium niobate nano-ferroelectric memory; and during lithium niobate nano-domain imaging, the direct current is applied, and then the structure imaging resolution of the lithium niobate nano-domain can be obviously improved, thereby verifying whether the lithium niobate nano-domain is formed by reversion or not, and determining the size of the nano-domain.

Description

technical field [0001] The invention relates to a processing method for ferroelectric materials, in particular to an imaging method for lithium niobate nano domains. Background technique [0002] Lithium niobate crystal is a multifunctional material integrating ferroelectric, piezoelectric, pyroelectric, nonlinear, electro-optic, photoelastic, photorefractive and other properties. It not only has good thermal and chemical stability, Moreover, it is easy to process and low in cost. It has been widely used in ferroelectric memories, pyroelectric infrared detectors, electro-optic switches, laser modulators, optical parametric oscillators, and integrated optical components. [0003] Spontaneous polarization is an intrinsic property of ferroelectric materials. When the applied electric field is zero, the remnant polarization Pr remains on the ferroelectric. Ferroelectric memory is to use two stable polarization states, positive and negative Pr encoded as 1 or 0 to achieve the ...

Claims

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Application Information

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IPC IPC(8): C30B33/04C30B29/30B82Y40/00G01Q60/00
CPCB82Y40/00C30B29/30C30B33/04G01Q60/00
Inventor 刘晓燕吕思宜贾碧
Owner CHONGQING UNIVERSITY OF SCIENCE AND TECHNOLOGY
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