Differential mems microphone
A microphone and motor technology, applied in the field of microphones, can solve the problems of expensive, increased device size, small package size, etc.
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[0031] The present disclosure provides a differential and compact dual-diaphragm microelectromechanical system (MEMS) motor. As used herein, "motor" includes components, such as diaphragms and backplates, that transform acoustic energy into electrical signals. According to various embodiments, the present disclosure provides better signal-to-noise ratio (SNR) performance in smaller sized devices than previous approaches.
[0032] now refer to figure 1 , an example of a MEMS microphone 100 is described. The microphone 100 includes a base 102 (e.g., a printed circuit board), a microelectromechanical systems (MEMS) device 104 (including a diaphragm and a backplate), an integrated circuit 106 (e.g., an application specific integrated circuit), and enclosing the MEMS device 104 and the integrated circuit 106. Cover or shroud 108 . An opening 110 passes through the base 102, making the microphone a bottom-opening microphone. However, it is contemplated that opening 110 may pass ...
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