A Fabrication Method of Polymer Microchannel Based on Spatiotemporal Shaping Femtosecond Laser

Abstract

The invention discloses a polymer micro-channel machining method based on space-time shaping femtosecond laser, and belongs to the field of laser application. The method comprises the following stepsthat step 1, a polymer substrate sample is prepared as a to-be-machined sample; step 2, repeat frequency of femtosecond laser monopulse is set as 10-20 Hz, and space-time shaping parameters are set that femtosecond laser monopulse shaping is modulated to be 1-3 pulse sequences, wherein each of the pulse sequences is composed of two sub-pulses, delay time between the two adjacent sub-pulses is -5ps-5ps, sub-pulse energy ratio is 1:1 or 2:1, total pulse energy is 30-50 muJ, and the distribution of sub-pulse light field is Bessel distribution; and step 3, according to the parameters, monopulse femtosecond laser is modulated as a space-time shaping double-pulse laser sequence, and the double-pulse laser sequence is focused on the surface of the to-be-machined sample prepared in the step 1 to form the polymer micro-channel by vertical machining. Local transient electron dynamics in material machining is effectively controlled by the space-time shaping, quality of the prepared polymer micro-channel is improved by vertical machining, and repeatability is high.

Description

technical field [0001] The invention relates to the field of laser applications, in particular to a polymer microchannel processing method based on spatiotemporal shaping femtosecond laser. Background technique [0002] With the development of science and technology, microchannels (with a diameter of tens of microns or even smaller) are manufactured based on biocompatible materials, such as gelatin, PVP (polyvinylpyrrolidone) or PDMS (polydimethylsiloxane) The representative polymer has a wide range of applications in the fields of organic photonics and biomedicine. For example, in the field of microfluidic sensors, by fabricating a microchannel on a very small device and coating it with a corresponding polymer, and immersing it in the liquid to be measured, the concentration of the liquid can be detected through the spectral absorption of the liquid. Similarly, in the field of biomedicine, this type of sensor can monitor the state of blood or other body fluids inside the o...

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Problems solved by technology

However, there are still obvious disadvantages in the obtained microchannel: First, because the Gaussian energy distribution laser is tightly focused by the microscope objective lens, the light intensity is not distributed equally in the radial direction of the focal spot (horizontal direction) and in the Rayleigh length direction (longitudinal direction). Even due to the self-focusing caused by the nonlinear effect, the light intensity is much longer than the Rayleigh radius in the vertical direction. During the horizontal processing (the incident direction of the laser is perpendicular to the direction of the microchannel), the processing result will be asymmetrical in the horizontal direction and the vertical direction, and the spindle shape will appear. processing results

However, the micro-nano fabrication of space-time shaping technology in the field of polymers is not deep enough, and the quality and depth of the obtained micro-channel structures are far inferior to those obtained on other substrate materials.

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