Article Transport Facility
一种输送设备、物品的技术,应用在输送机、输送机物件、机械输送机等方向,能够解决工作量增加等问题
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[0022] Embodiments of the article transport facility will be described based on the drawings. Such as Figure 1 to Figure 3 As shown, the article conveying facility includes: a traveling rail 2 serving as a rail provided along a traveling path 1 , and an article conveying vehicle 3 that travels along the traveling path 1 on the traveling rail 2 to convey articles W. In addition, in the present embodiment, the article transport vehicle 3 transports a FOUP (Front Opening Unified Pod, Front Opening Unified Pod) accommodating semiconductor substrates as the article W.
[0023] Such as figure 1 As shown, the travel route 1 includes a circular main route 4 , a circular sub route 5 passing through a plurality of article processing units P, and a connecting route 6 connecting the main route 4 and the sub route 5 . Travel route 1 includes a plurality of sub routes 5 . The article transport vehicle 3 travels in the same circular direction (clockwise in this embodiment) on both the ma...
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