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An ion implantation terminal device

A terminal device and ion implantation technology, which is applied in the direction of circuits, discharge tubes, electrical components, etc., can solve the problems of less implantation process menu, high cost, unstable motion control, etc., and achieve easy debugging of the whole machine, convenient operation, and compact structure Effect

Active Publication Date: 2020-12-04
BEIJING ZHONGKEXIN ELECTRONICS EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide an ion implantation terminal device capable of realizing multi-angle implantation, target disk Rotary motion, multi-station different injection styles, high cooling efficiency, etc.

Method used

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  • An ion implantation terminal device
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  • An ion implantation terminal device

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Embodiment Construction

[0016] like figure 1 As shown, an ion implantation terminal device according to an embodiment of the present invention includes a main cavity of a target chamber (1), a rotating target table (2), a transition cavity (3), a mobile shielding cylinder (4), a multi-station rotating Take the disc (5). The rotating target table (2) is installed on the main cavity (1) of the target chamber through the upper cover plate of the main cavity of the target chamber, thereby supporting the movement of the entire rotating target table, providing process conditions for the entire injection terminal system, and being able to achieve different The injection of the injection process conditions; the transition cavity (3) is fixed in front of the main cavity (1) of the target chamber by screws, and the mobile shielding cylinder (4) is fixed on the transition cavity (3) through the upper cover, thereby realizing the vertical position. control, has the functions of suppressing secondary electrons a...

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Abstract

The invention discloses an ion implantation terminal device, comprising: a target chamber main cavity, a rotating target platform, a transition cavity, a moving shielding cylinder, and a multi-stationrotating target disk, wherein the target chamber main cavity may provide support for the rotating target platform, which is capable of providing vacuum conditions for the entire system; the rotatingtarget platform enables angular injection and axial rotational injection of the target; the transition cavity may provide support for the moving shielding cylinder; the moving shielding cylinder may achieve vertical movement of the over-scan plate and the shielding cylinder, and enables precise control of the position; and the multi-station rotating target disk enables switching between differentstations. The invention relates to an ion implantation device and belongs to the field of semiconductor manufacturing.

Description

technical field [0001] The invention relates to a semiconductor device manufacturing equipment, namely an ion implanter, in particular to an ion implantation terminal device, which belongs to the field of semiconductor equipment. Background technique [0002] With the improvement of integrated circuit technology, higher requirements are put forward for ion implantation equipment. There are more types of ion implantation elements, and the application range of ion implantation equipment is wider. It can be used in various material modification, semiconductor device manufacturing. And high-power devices such as SiC electronic device manufacturing and other fields, and require a high degree of automation of ion implantation equipment, simple and convenient operation, and stable work. [0003] The existing ion implantation target platform system cannot meet the requirements of large-angle implantation, high uniformity implantation and continuous and stable operation, and has disa...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/02H01J37/20H01J37/244H01J37/317
CPCH01J37/026H01J37/20H01J37/244H01J37/3172
Inventor 李晨冉
Owner BEIJING ZHONGKEXIN ELECTRONICS EQUIP