Chemical mechanical polishing solution suitable for stainless steel polishing and application thereof
A chemical mechanical and polishing fluid technology, applied in the direction of polishing compositions containing abrasives, etc., can solve the problems of low gloss and low polishing efficiency
Inactive Publication Date: 2018-11-06
上海映智研磨材料有限公司
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Problems solved by technology
[0005] In view of the above-mentioned shortcoming of prior art, the object of the present invention is to provide a kind of chemical mechanical polishing liquid, is mainly applicable to stainless steel substrate, is used to solve the problem of low polishing efficiency and low gloss of rust steel polishing liquid in the prior art
Method used
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Embodiment 1～4
[0024] Examples 1-4 Under the condition of mechanical stirring, add the required amount of alumina particles into deionized water for dispersion and dilution, then add dispersant and oxidant in sequence, and finally add pH regulator and stir well. Examples 1-4 and comparative examples 1-2 were prepared by this method, and the total amount of each example was 100 kg, and the specific proportions thereof are shown in Table 1.
[0025] Table 1 Chemical Mechanical Polishing Fluid Components and Their Consumption
[0026]
[0027] The chemical mechanical polishing of stainless steel was carried out with the above polishing liquid, and the polishing conditions are shown in Table 2.
[0028] Table 2 Polishing conditions
[0029]
[0030]
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The invention provides a chemical mechanical polishing solution suitable and application of the chemical mechanical polishing solution. The chemical mechanical polishing solution at least is preparedfrom the following components in parts by weight: 30-50 parts of aluminium oxide polishing particles, 3-10 parts of oxidant, 1-10 parts of dispersant, preferably 2-7 parts, 0.01-2 parts of pH regulator and an appropriate amount of water. The polishing solution provided by the invention is adopted for polishing stainless steel, the polishing speed reaches 0.4 mg / min, and the glossiness is greater than 900 CU.
Description
technical field [0001] The invention relates to a chemical mechanical polishing liquid, which belongs to the field of chemical industry. Background technique [0002] Traditional stainless steel polishing methods include chemical polishing, mechanical polishing, electrolytic polishing, etc. All of these methods have a common advantage: they can polish non-planar products. However, for the appearance parts of consumer electronics products, a mirror effect with high surface quality is required, and the above polishing methods cannot meet this requirement. [0003] Chemical mechanical polishing is a technology that combines chemical polishing and mechanical polishing to process the surface of materials. Chemical mechanical polishing absorbs the advantages of chemical polishing and mechanical polishing. It can obtain a more perfect surface while ensuring the material removal efficiency. Achieve surface roughness from the nanometer to the atomic level. Therefore, chemical mech...
Claims
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Login to View More IPC IPC(8): C09G1/02C23F3/06
CPCC09G1/02C23F3/06
Inventor 张泽芳彭诗月
Owner 上海映智研磨材料有限公司