MEMS frequency partition matrix microphone sensor for environment noise monitoring

Abstract

The invention provides a MEMS frequency partition matrix microphone sensor for environment noise monitoring. The microphone sensor comprises an end substrate and a flexible substrate with one end connected with the end substrate; sensor envelopes for contacting sound traveling waves in the liquid are respectively arranged at two sides of the flexible substrate, and more than two resonance units for converting the vibration of the sound traveling wave into the charge to the flexible substrate are arranged between two sides of the flexible substrate and the corresponding sensor envelopes. Compared with the prior art, the sensor structure converts the sound traveling wave vibration of the resonance unit into the charge to the flexible substrate, various frequencies in the sound are enhanced in a partition way through the resonant cavities with different feature values, thereby separating the different sound frequencies in the partition with the serial number; the detailed spectrum processing is performed through the sound so as to acquire different feature values of the sound frequency; furthermore, the flexible substrate can acquire various acoustic spectrum feature values of the sound, the output sound signal with the serial number is more convenient for the signal demand of the subsequent neural network algorithm processing.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a MEMS frequency division matrix microphone sensor for environmental noise monitoring. Background technique [0002] The disadvantage of the current MEMS silicon capacitor microphone acoustic-electric transduction technology is that when the sound is transmitted to the vibrating membrane, the connecting rod is directly driven to drive the silicon capacitor, and the "acoustic-electric" transduction is performed directly, and there is no different resonant cavity for sound frequency brushing. selection, the frequency partition cannot be performed, resulting in signal distortion. Contents of the invention [0003] In view of the above problems, the present invention provides a MEMS frequency partition matrix microphone sensor for environmental noise monitoring, which can strengthen the partition of each frequency in the sound, so that different sound frequencies can be separated in the numb...

AI Technical Summary

Problems solved by technology

[0002] The disadvantage of the current MEMS silicon capacitor microphone acoustic-electric transduction technology is that when the sound is transmitted to the vibrating membrane, the connecting rod is directly driven to drive the silicon capacitor, and the "acoustic-electric" transduction is performed directly, and there is no different resonant cavity for sound frequency brushing. selection, the frequency partition cannot be performed, resulting in signal distortion

Images