High-precision angle measurement error detection device and its detection method based on double autocollimators

Abstract

The application discloses a high-precision angle measurement error detection device and its detection method based on double autocollimators, including: a tested photoelectric encoder; The device rotates coaxially; the first autocollimator and the second autocollimator are respectively aligned with the anti-diameter surface of the polyhedral prism, and are used to simultaneously measure the angle measurement error value of the photoelectric encoder under test; the processor uses It is used to read the angle measurement error value and process it through the preset error calculation algorithm to obtain the high-precision angle measurement error result of the photoelectric encoder under test. The device collects the error measurement results of two autocollimators for the photoelectric encoder under test at the same time, and completes the high-precision error detection of the photoelectric encoder under test according to the preset error calculation algorithm, eliminating the error caused by the non-level polygonal prism The detection is inaccurate, and the error detection of the high-precision photoelectric encoder can be accurately realized, the detection method is simple, and the detection accuracy is greatly improved.

Description

technical field [0001] The invention relates to the technical field of photoelectric displacement precision measurement, in particular to a high-precision angle measurement error detection device and a detection method based on double autocollimators. Background technique [0002] Photoelectric shaft encoder, also known as photoelectric angle position sensor, is a precision digital angle measuring device integrating light, mechanics and electricity. It uses a high-precision measurement circular grating as the detection element, and converts the angular position information into digital codes through photoelectric conversion. It has the advantages of high precision, wide measurement range, small size, light weight, reliable use, and easy maintenance. It is widely used in Radar, robot, photoelectric theodolite, CNC machine tools and many other fields. [0003] When using a polygonal prism and a laser autocollimator to detect the angle measurement error of a high-precision pho...

AI Technical Summary

Problems solved by technology

When performing error detection on a high-precision photoelectric encoder, the detection result is often affected by the levelness, so the detection result cannot accurately reflect the real error of the photoelectric encoder under test

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