High-precision angle measurement error detection device and method based on double autocollimators

Abstract

The invention discloses a high-precision angle measurement error detection device and method based on double autocollimators, and the device comprises a detected photoelectric encoder; a multi-facetedprism which is located above the tested photoelectric encoder and rotates synchronously with the tested photoelectric encoder; the first autocollimator and the second autocollimator which are respectively aligned with the opposite diameter surfaces of the multi-faceted prism and are used for simultaneously measuring the angle measurement error values of the tested photoelectric encoder; a processor which is used for reading the angle measurement error values and processing the angle measurement error values through a preset error calculation algorithm to obtain a high-precision angle measurement error result of the tested photoelectric encoder. The device simultaneously collects the error measurement results of the two autocollimators for the tested photoelectric encoder, and completes the high-precision error detection of the tested photoelectric encoder according to the preset error calculation algorithm, avoids the inaccurate measurement caused by a condition that the multi-facetedprism is not level, can achieve the accurate detection of the error of the high-precision photoelectric encoder, is simple in detection method, and greatly improves the detection precision.

Description

technical field [0001] The invention relates to the technical field of photoelectric displacement precision measurement, in particular to a high-precision angle measurement error detection device and a detection method based on double autocollimators. Background technique [0002] Photoelectric shaft encoder, also known as photoelectric angle position sensor, is a precision digital angle measuring device integrating light, mechanics and electricity. It uses a high-precision measurement circular grating as the detection element, and converts the angular position information into digital codes through photoelectric conversion. It has the advantages of high precision, wide measurement range, small size, light weight, reliable use, and easy maintenance. It is widely used in Radar, robot, photoelectric theodolite, CNC machine tools and many other fields. [0003] When using a polygonal prism and a laser autocollimator to detect the angle measurement error of a high-precision pho...

AI Technical Summary

Problems solved by technology

When performing error detection on a high-precision photoelectric encoder, the detection result is often affected by the levelness, so the detection result cannot accurately reflect the real error of the photoelectric encoder under test

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