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Polarization imaging system calibration method

A technology of polarization imaging and calibration method, which is applied in the direction of measuring the polarization of light, measuring devices, instruments, etc., can solve the problems of no polarization imaging system calibration method and inapplicable calibration scheme, and achieves simple operation, improved measurement accuracy, and measurement accuracy. high effect

Active Publication Date: 2018-11-23
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

The traditional calibration scheme does not calibrate the coupled collimator. In the polarization imaging system that introduces the coupled collimator, the traditional calibration scheme is not applicable. The existing calibration methods are only for the calibration of the Mueller matrix polarimeter, and there is no A Complete Calibration Method for Polarization Imaging Systems

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Embodiment Construction

[0014] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0015] The purpose of the present invention is to calibrate the polarization imaging system. By adopting the multi-step eigenvalue calibration method to complete the calibration of the polarization imaging system, and by completing the calibration of the imaging objective lens and the collimating mirror, the measurement accuracy of the polarization imaging system is improved.

[0016] figure 1 It is a schematic diagram of the device used in the calibration method of the polarization imaging system of the present invention. The calibration device used in the calibration method of a polarization imaging system of the present invention includes a laser, a polarization state generator PSG, and an imaging objective lens L 1 , collimator L 2 , Polarization state analyzer PSA and detector CCD. Among them, the polarization state generator PSG consists of a pola...

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Abstract

The invention provides a polarization imaging system calibration method; the method can calibrate an imaging object lens and a collimating lens, can eliminate errors introduced by the imaging object lens and the collimating lens, and can improve the polarization imaging system measuring precision. The method uses a multistep eigenvalue method to calibrate the coupling collimating lens, thus improving the measuring precision of the imaging object lens polarization aberration. The method can realize online measurement, does not need other measuring device to calibrate the device, and does not need to change existing optical paths and thus causing other errors; the calibration method can calibrate each device in the system, is simple in operation and high in measuring precision.

Description

technical field [0001] The invention belongs to the technical field of imaging system calibration, and in particular relates to a calibration method of a polarization imaging system. Background technique [0002] Current high-resolution polarization confocal microscopes, telescopes, and lithography systems used to manufacture VLSIs all use polarization imaging technology. The polarization aberration of polarization imaging systems has become an important factor affecting imaging quality and sample measurement accuracy. Accurately calibrated polarization imaging system is of great significance to precisely control polarization aberration, improve imaging quality and sample measurement accuracy. [0003] The Mueller matrix polarimeter is used to measure the polarization aberration of optical systems and optical components, and is mainly composed of a polarization state generator PSG (Polarization State Generator) and a polarization state analyzer PSA (Polarization State Analyz...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J4/00G01M11/02
CPCG01J4/00G01M11/02G01J4/04
Inventor 李艳秋李建慧
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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