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Flowing speed sensor and fabrication method thereof

A flow velocity sensor, square technology, applied in fluid velocity measurement, instrumentation, velocity/acceleration/impact measurement, etc., can solve problems such as unfavorable layout, complex structure of gas flow velocity sensor, etc., and achieve easy micropatterning and batch production, and preparation method simple effect

Active Publication Date: 2018-11-30
BEIHANG UNIV
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Problems solved by technology

[0005] The purpose of the present invention is to provide a flow velocity sensor and its preparation method, which can solve the technical problems that the existing gas flow velocity sensor has a complex structure and is not conducive to being arranged on the surface of the flexible airfoil of a micro aircraft

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  • Flowing speed sensor and fabrication method thereof
  • Flowing speed sensor and fabrication method thereof
  • Flowing speed sensor and fabrication method thereof

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Embodiment Construction

[0039] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0040] The object of the present invention is to provide a flow velocity sensor and a preparation method thereof, which can solve the technical problems that the existing gas flow velocity sensor has a complex structure and is not conducive to being arranged on the surface of a flexible airfoil of a micro-aircraft.

[0041] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be fur...

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Abstract

The invention discloses a flowing speed sensor and a fabrication method thereof. The flowing speed sensor comprises a dual-layer polyimide film substrate, a graphene / polyimide piezoresistance unit anda signal lead. By arranging a simulated hair structure and the graphene / polyimide piezoresistance unit on a surface of the dual-layer polyimide film substrate, the flowing speed can be further measured by measuring stress change of the piezoresistance unit caused by bending of the simulated hair structure under an effect of an external fluid. The flowing speed sensor is simple in structure, and mass production is easy; with the design of employing simulated hair to sensor the flowing speed of the external fluid, the flowing speed sensor has the advantages of structural sensitivity and high measurement accuracy; and moreover, the flowing speed sensor employs a polyimide film as a flexible substrate, and the flowing speed sensor is more conveniently arranged on an arc wing surface and otherprobable curved surfaces.

Description

technical field [0001] The invention relates to the technical field of flow velocity measurement, in particular to a flow velocity sensor and a preparation method thereof. Background technique [0002] Flow velocity sensors are an indispensable means for underwater autonomous robots and self-stabilizing micro-aircraft to perceive changes in the external flow field. Especially for small and light micro-aircraft, the real-time sensing of wing surface flow field in complex environment is the key to improve its wind resistance and realize the active control of the flight process. [0003] Traditional flow velocity measurement methods, such as hot wire anemometer, turbine flowmeter, acoustic Doppler frequency shift velocimetry, and particle image tracking, cannot meet the above application requirements for MAVs due to their large size, low sensitivity, and complex structure. As a new type of microsensor, the hair sensor is designed by imitating biological hair in nature through ...

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Application Information

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IPC IPC(8): G01P5/08
CPCG01P5/08
Inventor 蒋永刚沈大卫张德远刘梦洋
Owner BEIHANG UNIV
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